Synthesis of Tetramethylammonium Hydroxide Solution Free from Chloride Ion by Electrolysis of Its Formate

Yagi, Osamu; Shimizu, Shumpei

doi:10.5796/electrochemistry.61.443

Cited by 2 publications

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“…Ultrapure TMAH was prepared by electrolysis of tetramethylammonium bicarbonate (TMAB). 1 In the process of preparing TMAB, methanol was used as a solvent and the byproduct.…”

Section: ■ Introductionmentioning

confidence: 99%

“…Tetramethylammonium hydroxide (TMAH) is extensively used as a developer for photoresists in a printed circuit board and ultrapure cleaning reagent for the chemical mechanical polishing (CMP) technology process. Ultrapure TMAH was prepared by electrolysis of tetramethylammonium bicarbonate (TMAB) . In the process of preparing TMAB, methanol was used as a solvent and the byproduct.…”

Section: Introductionmentioning

confidence: 99%

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Organic Salt Effect on Vapor–Liquid Equilibrium of the Methanol + Water System at Subatmospheric Pressure

Yang

Sun

et al. 2012

J. Chem. Eng. Data

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Isobaric vapor–liquid equilibrium (VLE) for methanol (1) + water (2) + tetramethylammonium bicarbonate (TMAB) has been measured at pressures of 66.52 kPa and 37.60 kPa. The binary data for methanol + water were correlated by the Wilson model at subatmospheric pressures. All of the experimental results of the binary system passed the thermodynamic consistency test by the area test of Redlich–Kister and the point test of Van Ness et al. The Ohe’s preferential solvation model was used to correlate the VLE data of the ternary system. The experimental results of the ternary system show that TMAB has a salt-out effect on methanol, and this effect enhances with increasing the concentration of TMAB.

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“…Ultrapure TMAH was prepared by electrolysis of tetramethylammonium bicarbonate (TMAB). 1 In the process of preparing TMAB, methanol was used as a solvent and the byproduct.…”

Section: ■ Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Organic Salt Effect on Vapor–Liquid Equilibrium of the Methanol + Water System at Subatmospheric Pressure

Yang

Sun

et al. 2012

J. Chem. Eng. Data

View full text Add to dashboard Cite

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“…Recently, semiconductors have been integrated more densely, and this progress requires a higher purity of TMAH. A more purified TMAH solution was obtained, through electrolysis of the tetramethylammonium bicarbonate (TMAC) in an electrolytic cell with a cation exchange membrane . TMAC is an organic salt, which molecular formula is (CH 3 ) 4 NHCO 3 .…”

Section: Introductionmentioning

confidence: 99%

Organic Salt Effect of Tetramethylammonium Bicarbonate on the Vapor–Liquid Equilibrium of the Methanol–Water System

Yang

Yin

2011

J. Chem. Eng. Data

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The effect of organic salt tetramethylammonium bicarbonate (TMAC) at salt mole fractions from 0 to 0.159 on the vaporÀliquid equilibrium (VLE) of the binary methanolÀwater system has been experimentally investigated at 101.32 kPa using a modified Rose equilibrium still. The experimental data were correlated by Ohe's preferential solvation model and the TanÀWilson model, and the average deviations of the vapor-phase mole fraction of this salt-containing methanolÀwater system are 0.011 and 0.017, respectively. The average deviations of temperature are 1.24 K for Tan's model.

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Synthesis of Tetramethylammonium Hydroxide Solution Free from Chloride Ion by Electrolysis of Its Formate

Cited by 2 publications

References 0 publications

Organic Salt Effect on Vapor–Liquid Equilibrium of the Methanol + Water System at Subatmospheric Pressure

Organic Salt Effect on Vapor–Liquid Equilibrium of the Methanol + Water System at Subatmospheric Pressure

Organic Salt Effect of Tetramethylammonium Bicarbonate on the Vapor–Liquid Equilibrium of the Methanol–Water System

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