Synthesis of Vertical High‐Density Epitaxial Si(100) Nanowire Arrays on a Si(100) Substrate Using an Anodic Aluminum Oxide Template

Shimizu, Tomohiro; Xie, Tian; Nishikawa, Jo; Shingubara, Shoso; Senz, Stephan; Gösele, U.

doi:10.1002/adma.200700153

Cited by 175 publications

(140 citation statements)

References 29 publications

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“…Regrettably, limited details describing the inclusion process were presented, including direct observation of the nanowire arrays within the channel supports and their interface to the metal seeds at the base of the porous template. Gösele et al demonstrated an alternative route for the preparation of arrays of epitaxial Si (100) nanowires grown by CVD using PAA membranes deposited on Si wafers with Au seeds precisely positioned at the bottom of the channels by electroless deposition [154]. Very recently, this approach was extended to the deposition of segmented Si/Ge nanowires within PAA membranes by growing heteroepitaxial Ge segments using the embedded Si nanowires (figures 15(a) and (b)) [155].…”

Section: Silicon and Germanium Nanostructures Within Paa Mtfs And Bcmentioning

confidence: 99%

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Farrell

Petkov²,

Morris

et al. 2010

Journal of Colloid and Interface Science

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Self-assembled nanoscale porous architectures, such as mesoporous silica films (MPS), block copolymer films (BCP) and porous anodic aluminas (PAAs), are ideal hosts for templating one dimension (1 D) nano-entities for a wide range of electronic, photonic, magnetic and environmental applications. All three templates offer dimensional scalability and tunability over a wide range, with critical pore sizes for each system well below the 20 nm threshold [1][2][3]. Recently, research has progressed towards controlling the pore direction, orientation and long range order of these nanostructures through so called directed self-assembly (DSA). Significantly, the introduction of a wide range of top-down chemically and physically pre-patterning substrates has facilitated the DSA of nanostructures into functional device arrays. The following review begins with an overview of the fundamental aspects of self-assembly and ordering processes during the formation of PAAs, BCPs and MPS films. Special attention is given to the different ways of directing self-assembly, concentrating on properties such as uni-directional alignment, precision placement and registry of the self-assembled structures to hierarchal or top down architectures. Finally, to distinguish this review from other articles we focus on research where nanostructures have been utilised in part to fabricate arrays of functioning devices below the sub 50 nm threshold, by subtractive transfer and additive methods. Where possible, we attempt to compare and contrast the different templating approaches and highlight the strengths and/or limitations that will be important for their potential integration into downstream processes. ACCEPTED MANUSCRIPT 3 SECTION 1.0: SELF ASSEMBLY AND NANO-ARCHITETCURESThe diversity of self-assembled nanostructures and more importantly, their precise orientation within a thin film (fixed to a substrate) ultimately determines their function and overall application. A large population of research reports to date have focused on identifying these orientations and related periodicities, using x-ray and microscopy tools, as well the development of methods for readily manipulating nanostructures, such as pre-patterning of silicon substrates for the alignment of block copolymers (BCPs) [4] and mesoporous thin films (MTFs) [5] and altering the growth direction of porous anodic alumina (PAA) templates [6]. In this section, a brief synopsis of the mechanisms behind the self-assembly/organisation of each system and highlight nanoscale architectures (and orientations), which are important from a device perspective. Templated mesoporous thin filmsOrdered mesoporous powders were first discovered by researchers at the Mobil Petrochemical Corporation in 1992 and shortly after, sol-gel derived mesoporous silica films were fabricated [1,7].The first series of ordered mesoporous films were reported by Yang et al. in 1996 [8], prepared using initial surfactant concentrations above their critical micelle concentration (CMC). However the films prepared fil...

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Section: Silicon and Germanium Nanostructures Within Paa Mtfs And Bcmentioning

confidence: 99%

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Farrell

Petkov²,

Morris

et al. 2010

Journal of Colloid and Interface Science

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“…This approach also leads to epitaxial 〈100〉 oriented nanowires, an orientation usually not favored by free-standing nanowires. 49 …”

Section: Low Temperature Chemical Vapor Depositionmentioning

confidence: 99%

“…29,45,46 This kinking problem, however, can be circumvented by growing the nanowires inside a template such as anodic aluminum oxide (AAO). [47][48][49] The template forces the nanowire to grow straight along the pore direction. This approach also leads to epitaxial 〈100〉 oriented nanowires, an orientation usually not favored by free-standing nanowires.…”

Section: Low Temperature Chemical Vapor Depositionmentioning

confidence: 99%

Growth, Thermodynamics, and Electrical Properties of Silicon Nanowires

2010

Self Cite

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Volker Schmidt studied Physics at the Bayerische Julius-Maximilians-Universita ¨t Wu ¨rzburg, Germany, and at the State University of New York at Buffalo. He received his Ph.D. from the Max Planck Institute of Microstructure Physics in Halle, Germany, working on growth and properties of silicon nanowires. Volker Schmidt also worked as a guest scientist at the IBM Zurich research laboratories in Ru ¨schlikon, Switzerland,

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“…Then, self-organized nanoholes having a triangle lattice is formed in a downward direction with high aspect ratio. And the aspect ratio is controllable by anodic condition, for example type of electrolyte solution, applying potential, anodization time and solution temperature [7]. In this study, we attempted to fabricate AAO nanostructure on the electrode of quartz crystal, and the surface area was estimated.…”

Section: Introductionmentioning

confidence: 99%

Fabricating a Highly Sensitive QCM Sensor Using AAO Nanoholes and Its Application for Biosensing

Asai

Shimizu

Shingubara

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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A nanostructure composed of Anodic Aluminum Oxide (AAO) was obtained on an electrode of a quartz crystal microbalance (QCM) chip by anodizing Al thin film in an oxalic acid solution. The effective surface area was expanded by these nanostructures. Several morphologies were observed under various anodic conditions by using scanning electron microscopy (SEM). We demonstrated that a QCM chip with the AAO was effective in biosensing because of its large surface area. The frequency shift corresponding to an antigen-antibody reaction improved on the nanostructured electrode compared with a flat surface electrode.

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Synthesis of Vertical High‐Density Epitaxial Si(100) Nanowire Arrays on a Si(100) Substrate Using an Anodic Aluminum Oxide Template

Cited by 175 publications

References 29 publications

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Growth, Thermodynamics, and Electrical Properties of Silicon Nanowires

Fabricating a Highly Sensitive QCM Sensor Using AAO Nanoholes and Its Application for Biosensing

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