Synthesis, structure, and unusual reactivity of a d10-d10 palladium(0) dimer

Pan, Yang; Mague, Joel T.; Fink, Mark J.

doi:10.1021/ja00062a087

Cited by 69 publications

(60 citation statements)

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“…As mention previously, the photochemistry of platinum and palladium oxalates is well documented, [10][11][12][13][14] and in our work, we found that oxalate complexes of first-row transition metals produce negative-tone EUV resists capable of 18-nm resolution with sizing doses of 30 mJ∕cm 2 . 7 To investigate the EUV photoreactivity of L 2 MðC 2 O 4 Þ (M ¼ Pt or Pd), four complexes were initially synthesized according to previously described methods [ Fig.…”

Section: Oxalatessupporting

confidence: 84%

“…The photomechanistic studies of L 2 MðC 2 O 4 Þ as presented in the literature show experiments performed at longer wavelengths, in solution and usually in the absence of air. [11][12][13][14][15] Though our photochemistry is done at EUV and in the solid state, we propose four possible photoproducts for the EUV exposure of L 2 PdC 2 O 4 based on the literature and based on educated guesses (Fig. 8).…”

Section: Photomechanistic Studiesmentioning

confidence: 99%

“…[10][11][12][13][14] For example, Paonessa et al 10 identified the formation of two equivalents of CO 2 as (L 2 PtC 2 O 4 ) is exposed to light. This produces a highly reactive intermediate (L 2 Pt) which then reacts with itself to yield L 3 Pt and platinum metal.…”

Section: Introductionmentioning

confidence: 99%

“…This produces a highly reactive intermediate (L 2 Pt) which then reacts with itself to yield L 3 Pt and platinum metal. Blake and Nyman 12 and Pan et al 14 identified the formation of an L 4 Pt 2 dimer when L 2 PtC 2 O 4 is irradiated at UV. Here, we present similar photochemistry performed at EUV.…”

Section: Introductionmentioning

confidence: 99%

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Platinum and palladium oxalates: positive-tone extreme ultraviolet resists

Sortland

Hotalen

et al. 2015

J. Micro/Nanolith. MEMS MOEMS

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Abstract. Here, we present platinum and palladium mononuclear complexes with EUV photosensitivity and lithographic performance. Many platinum and palladium complexes show little or no EUV sensitivity; however, we have found that metal carbonates and metal oxalates (L 2 MðCO 3 Þ and L 2 MðC 2 O 4 Þ; M ¼ Pt or Pd) are sensitive to EUV. The metal carbonates give negative-tone behavior. The most interesting result is that the metal oxalates give the first positive-tone EUV resists based on mononuclear organometallic compounds. In particular, (dppm)Pd(C 2 O 4 ) (dppm ¼ 1,1-bis(diphenylphosphino)methane) (23) prints 30-nm dense lines with E size of 50 mJ∕cm 2 . Derivatives of (23) were synthesized to explore the relationship between the core metal and the resist sensitivity. The study showed that palladium-based resists are more sensitive than platinum-based resists. The photoreaction has been investigated for two of our most promising resists, ðdppmÞPdðC 2 O 4 Þ (23) and ðPh 2 EtPÞ 2 PdC 2 O 4 (27). Our experiments suggest the loss of CO 2 and the formation of a zerovalent L 4 Pd complex upon exposure to light. We have identified dppm 2 PdðδðPÞ23:6Þ as the main photoproduct for (23) and ðPh 2 EtPÞ 4 Pd (δðPÞ32:7) as the main photoproduct for (27).

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Section: Oxalatessupporting

confidence: 84%

Section: Photomechanistic Studiesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Platinum and palladium oxalates: positive-tone extreme ultraviolet resists

Sortland

Hotalen

et al. 2015

J. Micro/Nanolith. MEMS MOEMS

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“…Thus, it was reasonably assumed that the first one-electron oxidation of 34 gave a mixed-valence monocationic species [34] + , where two palladium atoms electrochemically communicated through a Mo 2 unit, and the second one-electron oxidation resulted in the formation of [34] 2+ , i.e., complex 32 in acetonitrile (Scheme 4). 93,94 which have been reported to have unique attractive bonding interaction between two Pd 0 atoms through dp mixed ·-bonding orbitals. …”

Section: 84mentioning

confidence: 99%

Linearly Aligned Metal Clusters: Versatile Reactivity and Bonding Nature of Tetrametal M–Mo–Mo–M Complexes (M = Pt, Pd, Ir, and Rh) Supported by 6-Diphenylphosphino-2-pyridonato Ligand

Mashima¹

2010

Bulletin of the Chemical Society of Japan

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A tridentate ligand, pyphos (6-diphenylphosphino-2-pyridonato), was utilized to prepare tetrametal complexes since this ligand has unique coordinating sites comprised of three different elements, i.e., phosphorus, nitrogen, and oxygen, in almost linear fashion. By using pyphos ligand, linearly aligned tetrametal complexes of group 10 metals [Mo 2 M 2 -(pyphos) 4 X 2n ] (M = Pt and Pd; n = 0, 1, and 2) were prepared, and for group 9 metals, [Mo 2 M 2 (pyphos) 4 (RNC) 4

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Luminescence in Polymetallic Gold‐Heteronuclear Derivatives

Laguna

López‐de‐Luzuriaga

2010

Macromolecules Containing Metal and Metal‐Like Elements

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Synthesis, structure, and unusual reactivity of a d10-d10 palladium(0) dimer

Cited by 69 publications

References 0 publications

Platinum and palladium oxalates: positive-tone extreme ultraviolet resists

Platinum and palladium oxalates: positive-tone extreme ultraviolet resists

Linearly Aligned Metal Clusters: Versatile Reactivity and Bonding Nature of Tetrametal M–Mo–Mo–M Complexes (M = Pt, Pd, Ir, and Rh) Supported by 6-Diphenylphosphino-2-pyridonato Ligand

Luminescence in Polymetallic Gold‐Heteronuclear Derivatives

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