System analysis of full-field reflection-type three-dimensional angle-deviation microscope

Abstract

This study investigates the system errors found in full-field reflection-type three-dimensional angle-deviation microscopes. The microscope, which is based on the algorithm of reflectivity-height transformation, can be used to measure the 3D surface profile of a specimen in real time without scanning. The system error is made up of the errors caused by the optical components, light source, deflection direction of the test light, lack of focus, object length, magnification, and numerical aperture. The incorrect object location is the principal cause of height measurement error. However, the total error percentage is below 3.2%, and the lateral and axial resolutions are better than 0.5 μm and 1 nm, respectively, in the measuring range of 200 nm.

Full-field transmission-type angle-deviation optical microscope with reflectivity-height transformation

“…This small difference shows that the 3D profile of the surface being measured can be drawn in any direction of angle deflection at the θ = 5.9°. The result is similar to the result of reflection-type 3D ADM [17]. The other specimen is Euglena.…”

“…. This work is similar to the reflection-type ADM [3,17] but the structure is different. This transmissiontype ADM with the magnification factor spanning from 50X to 120X is larger than the designs in the previously reported works [2,3] and the calculation method decreases the nonlinear error.…”

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“…In addition, angular, proportional, and volumetric measurements can be made, while we can create hundreds of colorful facial maps and image simulations. [31][32][33] Laser Scanning Laser scanning 3D imaging technology is used for facial soft tissue imaging. The image is taken at 0.5-mm sensitivity and for 8-10 seconds.…”