DTCO and Computational Patterning II 2023
DOI: 10.1117/12.2656469
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System-level evaluation of 3D power delivery network at 2nm node

Abstract: Fine-pitch 3D integration is considered a promising way to advance traditional CMOS scaling as 3D interconnects are currently capable to match the connectivity among functional sub-blocks of a system, enabling their displacement on different tiers. A major bottleneck for 3D ICs is represented by the power delivery, due to the challenge of supplying multiple dies. This work aims to provide insights into the system-level impact of PDN in a 3D chip, in terms of frequency and IR drop. A highly-interconnected memor… Show more

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