Systematic study of packaging designs on the performance of CMOS thermoresistive micro calorimetric flow sensors

Xu, Wei; Pan, Liang; Gao, Bo; Chiu, Yi; Xu, Kun; Lee, Yi-Kuen

doi:10.1088/1361-6439/aa7665

Cited by 10 publications

(3 citation statements)

References 23 publications

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“…The sensor size herein was 300 µm × 250 µm in Figure 7a,b, which is smaller than many prior arts'. Within the flow speed range of 0-15 m/s in a wind tunnel, a normalized sensitivity of this small CMOS MEMS sensor was obtained as 138 µV/V/(m/s)/mW, which is with the same order of magnitude to the best value of 160 µV/V/(m/s)/mW of the prior arts [59,60,62,76,93,94,97,185].…”

Section: Smaller Device Sizementioning

confidence: 69%

Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor

et al. 2022

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The complementary metal-oxide-semiconductor (CMOS) process is the main stream to fabricate integrated circuits (ICs) in the semiconductor industry. Microelectromechanical systems (MEMS), when combined with CMOS electronics to form the CMOS MEMS process, have the merits of small features, low power consumption, on-chip circuitry, and high sensitivity to develop microsensors and micro actuators. Firstly, the authors review the educational CMOS MEMS foundry service provided by the Taiwan Semiconductor Research Institute (TSRI) allied with the United Microelectronics Corporation (UMC) and the Taiwan Semiconductor Manufacturing Company (TSMC). Taiwan’s foundry service of ICs is leading in the world. Secondly, the authors show the new flow sensor integrated with an instrumentation amplifier (IA) fabricated by the latest UMC 0.18 µm CMOS MEMS process as the case study. The new flow sensor adopted the self-heating resistive-thermal-detector (RTD) to sense the flow speed. This self-heating RTD half-bridge alone gives a normalized output sensitivity of 138 µV/V/(m/s)/mW only. After being integrated with an on-chip amplifier gain of 20 dB, the overall sensitivity of the flow sensor was measured and substantially improved to 1388 µV/V/(m/s)/mW for the flow speed range of 0–5 m/s. Finally, the advantages of the CMOS MEMS flow sensors are justified and discussed by the testing results.

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Section: Smaller Device Sizementioning

confidence: 69%

Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor

et al. 2022

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“…The middle part of the computational domain formed by the small MEMS cavity and the large CMOS cavity divides the flow into two regions, the upper part of which is smaller in volume and slower in flow rate. Additionally, there is a significant flow separation phenomenon caused by an adverse pressure gradient [27], which will result in two consequences: on the one hand, the heat in the upstream detector region at high flow rates cannot be carried to the downstream in time, and on the other hand, viscous friction will be generated between the return flow fluid and the upstream detector. These two factors will contribute to the temperature difference between upstream and downstream decreasing gradually with the increase in flow rate, and consequently, the measure range of the sensor will narrow.…”

Section: The Effect Of Heater-detector Spaces On Sensor Performancementioning

confidence: 99%

Investigation on the Effective Measures for Improving the Performance of Calorimetric Microflow Sensor

Qi,

Shao,

et al. 2023

Sensors

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The performance of the calorimetric microflow sensor is closely related to the thermal sensing part design, including structure parameter, heater temperature, and operation environment. In this paper, several measures to enhance the performance of the calorimetric microflow sensor were proposed and further verified by numerical simulations. The results demonstrate that it is more favorable to reduce the negative impact of flow separation as the space between detectors and heater is set to be 1.6 μm so as to improve the accuracy of the sensor. With an appropriate gap, the front arranged obstacle of the upstream detector can effectively widen the measure range of the sensor, benefiting from the decrease in upstream viscous dissipation. Compared to a cantilever structure, the resonances can be effectively suppressed when the heater and detectors are designed as bridge structures. In particular, the maximum amplitude of the bridge structure is only 0.022 μm at 70 sccm, which is 53% lower than that of the cantilever structure. The optimized sensor widens the range by 14.3% and significantly increases the sensitivity at high flow rates. Moreover, the feasibility of the improved measures is also illustrated via the consistency of the trend between the simulation results and experimental ones.

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“…using porous silicon to replace SC silicon [38]) and choice of high Seebeckcoefficient thermocouple materials [41,43]. An alternative way to improve the detection of low flow rate is reducing the cross-sectional area of the fluid channel to increase flow velocity [93]. However, this approach is at the expense of sacrificing the measure range.…”

Section: Challenges and Perspective On Silicon-based Thermal Flow Sen...mentioning

confidence: 99%

Silicon monolithic microflow sensors: a review

Wang¹,

Xue²,

Li³

2021

J. Micromech. Microeng.

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Flow measurement is an essential requirement in medical, industrial, automotive and environmental applications, Thanks to the rapid development of microelectromechanical system (MEMS) micro-fabrication techniques, silicon-based microflow sensor chips used as the key component of microfluidic control systems have attracted particular attentions due to the miniaturized chip-size, high precision, low power consumption, rapid response and low-cost batch-fabrication capability. Up to present, many different types of silicon microflow sensors have been proposed and developed. This paper provides a review on recently completed works on design, fabrication and properties of the MEMS-based silicon monolithic microflow sensors. Some technical challenges and application outlooks are also discussed in the paper.

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Systematic study of packaging designs on the performance of CMOS thermoresistive micro calorimetric flow sensors

Cited by 10 publications

References 23 publications

Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor

Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor

Investigation on the Effective Measures for Improving the Performance of Calorimetric Microflow Sensor

Silicon monolithic microflow sensors: a review

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