Thin films exhibit large surface-to-volume ratios, allowing interfacial thermodynamics to play a significant role in the microstrutural evolution. Atom probe tomography's (APT) ability to detect atoms of equal sensitivity with near atomic spatial reconstruction resolution makes it an ideal technique to quantify the interfacial chemistry in these films. For example, in multi-element thin films, preferential partitioning or intermixing of species can regulate stresses or phases by changing the relative thermodynamic energies at the interfaces. In this study, three particular cases have been characterized using APT in order to evaluate the role of atomic-level chemical structure on either the stress or phase stability in thin films.Arguably, most work on in situ thin film stress evolution has been for elemental materials. While these results have been paramount in our basic understandings of thin film nucleation and growth, multicomponent systems have the added complexity of interactions between different atom types, such as segregation or chemical reactions. These interactions can lead to stress responses that deviate from single elemental materials.