Ordered
porous gold/titanium dioxide (Au/TiO2) hybrid
nanostructured films are specifically interesting in large-scale applications
using localized surface plasmon resonances (LSPRs) and surface-enhanced
Raman scattering (SERS). Deposition of Au nanoparticles via sputter
deposition is one of the promising technologies to establish optically
active sites at low cost in combination with nanostructured TiO2 films. In this work, we investigate the optical response
of sputter-deposited Au/TiO2 nanohybrid thin films with
a focus on the plasmonic response and application as molecular sensors.
The LSPR peak red shifts with an increasing thickness of deposited
Au. The Raman intensity of deposited molecules, probed with rhodamine
6G (R6G), depends on the deposited gold thickness. It has its maximum
at an effective Au thickness of 3.4 nm. To elucidate the origin of
this behavior, we apply in situ grazing-incidence
small-angle X-ray scattering (GISAXS) to investigate the growth kinetics
of Au on a TiO2 template during sputter deposition. On
the basis of time-resolved GISAXS, the growth characteristics of sputter-deposited
Au on a TiO2 template with a final effective Au layer thickness
around the percolation threshold is described with the well-known
four-stage model of nucleation and cluster formation, diffusion-mediated
growth, adsorption-mediated growth, and grain growth. The maximum
in SERS intensity is corroborated by the existence and optimal size
of hot spots in the narrow space occurring between the sputter-deposited
Au clusters, on staying below the percolation threshold. On the basis
of the growth laws extracted, we give a guideline for tailoring the
ordered porous Au/TiO2 nanohybrid thin films for SERS sensor
applications.