2018
DOI: 10.1080/02670844.2018.1425198
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Tantalum coating prepared by APCVD and in-vivo biological evaluation

Abstract: Tantalum coating for bio-medical applications is prepared by atmospheric pressure chemical vapour deposition in a TaF 5 -H 2 system on the inner wall of a stainless steel tube. The concentration of hydrogen fluoride (HF) has a significant effect on the morphology and crystallographic orientation of the tantalum coating. As the HF concentration increases, the tantalum coating gradually becomes smooth from roughness. The rougher part and the smoother part of tantalum coating reveal ( 200) and ( 110) preferred or… Show more

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