In this study, a high-performance humidity sensor based
on KCl-doped
CuO/SnO2 p–n heterostructures was fabricated by
a ball milling–roasting method. The morphology and nanostructure
of the fabricated KCl-CuO/SnO2 composite were characterized
by scanning electron microscopy, X-ray diffraction, transmission electron
microscopy, X-ray photoelectron spectroscopy, and nitrogen sorption
analysis. The results showed that the humidity sensor had a high sensitivity
of 194 kΩ/%RH, short response and recovery times of 1.0 and
1.5 s, a low hysteresis value, and good repeatability. The energy
band structure and complex impedance spectrum of the KCl-CuO/SnO2 composite indicated that the excellent humidity sensing performance
originated from the ionic conductivity of KCl, the formation of heterojunctions,
the change in the Schottky barrier height, and the depletion of electronic
depletion layers. The KCl-CuO/SnO2 sensor has great potential
in respiratory monitoring, noncontact sensing of finger moisture,
and environmental monitoring.