TCADMEMS Overview

Abstract

This paper presents an overview of the important issues in thefield of TCAD MEMS. It will be shown different techniques to investigate the materials properties of MEMS and their impact on the RF MEMS characteristics. Multi-physic simulation are presented to predict the initial deformation of MEMS based membrane and to predict the capacitive and DC contact characteristics ofRF MEMS.

High-Accuracy Contact Resistance Measurement Method for Liquid Metal by Considering Current-Density Distribution in Transfer Length Method Measurement

“…Although the R c values of LMs have been measured, ,− accurate measurement is difficult, and accurate methods for measuring the R c of LMs have not been developed. The transfer length method (TLM) − and cross-bridge Kelvin resistor (CBKR) method are well-established methods for measuring R c . To measure the R c of LMs, the current-density distribution must be considered because LMs have the same sheet resistance ( R she ) as metal electrodes.…”

“…In this case, current can be applied to the outer electrodes for simplicity because all of the applied current passes through the interface ( I i = I ) for both current application methods. In previous studies, R c was obtained via finite-element method (FEM) simulation alone when the real contact area between the object and electrode and the formation of a surface layer on the object and electrode were known . However, the R c values of LMs are difficult to obtain via FEM simulations alone because the formation of an oxide layer on LMs and the real contact area are unknown.…”

“…In previous studies, R c was obtained via finite-element method (FEM) simulation alone when the real contact area between the object and electrode and the formation of a surface layer on the object and electrode were known. 42 However, the R c values of LMs are difficult to obtain via FEM simulations alone because the formation of an oxide layer on LMs and the real contact area are unknown. Furthermore, the R e and R o included in R c…”