TCF-Improved SH₀ Mode Acoustic Resonators Based on 30°YX-LINBO₃/SIO₂ Membrane

S0-like SAW mode resonator on LiNbO3/SiO2/SiC structure

“…One possibility is the use of the first-order antisymmetric (A 1 ) Lamb mode on a LiNbO 3 (LN) or LiTaO 3 (LT) thin plate. [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16] Resonators using this mode called [6][7][8][9][10] laterally excited bulk acoustic wave resonators (XBARs) have received much attention because of the extremely large K 2 in addition to high V p . In the configuration, f r is mostly determined by the LN/LT plate thickness and scarcely changes with p I .…”

“…These features are also true for the zeroth-order shearhorizontal (SH 0 ) plate mode. [13][14][15][16] Although this mode offers large K 2 , achievable V p is not so high.…”