Technique for monolithic fabrication of microlens arrays

Popović, Zoran D.; Sprague, Robert A.; Connell, G. A. N.

doi:10.1364/ao.27.001281

Cited by 503 publications

(230 citation statements)

References 5 publications

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“…Several researchers have reported on fabrication methods for microlenses and lens arrays with these materials. They include techniques like photoresist reflow [8], laser beam shaping [9], deep lithography with protons [10], LIGA processing (German acronym for Lithographie, Galvanik und Abformung) [11], photopolymerization [12], microjet printing [13], laser ablation [14] and direct laser [15] or e-beam writing [16]. Some methods are relatively inexpensive and are based on existing technologies while others require dedicated processing tools and/or new materials with special properties.…”

Section: Microlens Fabrication Techniques: the Timelinementioning

confidence: 99%

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Comparing glass and plastic refractive microlenses fabricated with different technologies

Ottevaere¹,

Cox²,

Herzig³

et al. 2006

J. Opt. A: Pure Appl. Opt.

167

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We review the most important fabrication techniques for glass and plastic refractive microlenses and we quantitatively characterize in a systematic way the corresponding state-of-the-art microlenses, which we obtained from selected research groups. For all our measurements we rely on three optical instruments: a non-contact optical profiler, a transmission Mach-Zehnder interferometer and a Twyman-Green interferometer. To conclude, we survey and discuss the different fabrication techniques by comparing the geometrical and optical characteristics of the microlenses, the range of materials in which the lenses can be produced, their potential for low-cost fabrication through mass-replication techniques and their suitability for monolithic integration with other micro-optical components.

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Section: Microlens Fabrication Techniques: the Timelinementioning

confidence: 99%

“…In this particular case plastic refractive microlenses are fabricated by melting cylindrical islands of a photoresist or a similar polymer [8]. To this end a glass substrate is first coated with a layer of this photoresist.…”

Section: Fabrication Of Thermal Reflow Microlensesmentioning

confidence: 99%

Comparing glass and plastic refractive microlenses fabricated with different technologies

Ottevaere¹,

Cox²,

Herzig³

et al. 2006

J. Opt. A: Pure Appl. Opt.

167

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show abstract

“…17 A hexagonal array of dots (2-μm diameter and 2-μm gap) patterned in AZ5214E resist with a thickness of 1 μm was reflowed at 140°C for 10 min giving the rounded profiles as shown in Fig. 7.…”

Section: Silicon Oxide Etchingmentioning

confidence: 99%

Low-power, low-pressure reactive-ion etching process for silicon etching with vertical and smooth walls for mechanobiology application

Ashraf

Sundararajan

Grenci

2017

J. Micro/Nanolith. MEMS MOEMS

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Abstract. We report our findings in developing a low-power etching recipe using a newly acquired reactive-ion etching (RIE) tool (RIE-10NR, Samco, Japan), with the aim of achieving smooth and vertical sidewalls in micropatterned silicon substrate. We used a combination of CF 4 , SF 6 , and O 2 gases, which at low power (30 W) and low pressure (2 Pa) allowed for vertical silicon etching (aspect ratio ∼2). We used photoresist and silicon oxide as the etching masks. As it is a continuous etching process, scalloping effects were not present, which is contrary to the process done with an inductively coupled plasma-based "Bosch" approach. We also show a successful use of these microstructures as master mold in soft-lithographic techniques for producing devices in elastomeric materials that have applications in mechanobiology. To the best of our knowledge, the recipe we present here has the lowest combination of power and pressure for etching silicon with vertical profile using a standard, parallel plates RIE tool. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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“…In this article, we present a new method which consists of a photoresist lithography process [12] and thermal reflow process [13] to integrate the multi-channels filter with a microlens array on one substrate. The structure can capture the images for different bands simultaneously, so it can be considered as a compact multi-spectral lens.…”

Section: Introductionmentioning

confidence: 99%

The fabrication of a multi-spectral lens array and its application in assisting color blindness

Jin

Liu

et al. 2015

International Journal of Optomechatronics

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This article presents a compact multi-spectral lens array and describes its application in assisting color-blindness. The lens array consists of 9 microlens, and each microlens is coated with a different color filter. Thus, it can capture different light bands, including red, orange, yellow, green, cyan, blue, violet, near-infrared, and the entire visible band. First, the fabrication process is described in detail. Second, an imaging system is setup and a color blindness testing card is selected as the sample. By the system, the vision results of normal people and color blindness can be captured simultaneously. Based on the imaging results, it is possible to be used for helping color-blindness to recover normal vision.

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Technique for monolithic fabrication of microlens arrays

Cited by 503 publications

References 5 publications

Comparing glass and plastic refractive microlenses fabricated with different technologies

Comparing glass and plastic refractive microlenses fabricated with different technologies

Low-power, low-pressure reactive-ion etching process for silicon etching with vertical and smooth walls for mechanobiology application

The fabrication of a multi-spectral lens array and its application in assisting color blindness

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