2003
DOI: 10.1063/1.1597939
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Techniques for the measurement of trace moisture in high-purity electronic specialty gases

Abstract: The control of water vapor (moisture) contamination in process gases is critical to the successful manufacture of semiconductor devices. As specified moisture levels have become more stringent, there is a growing demand for more sensitive analytical methods. Instrumental methods currently being used or in development for measuring trace moisture at ppbv levels include Fourier transform infrared spectroscopy, tunable diode laser absorption spectroscopy, cavity ringdown spectroscopy, intracavity laser spectrosco… Show more

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Cited by 99 publications
(88 citation statements)
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“…[1][2][3][4][5][6][7] Although a variety of techniques for aquametry have been reported in the literature, 1,[8][9][10] only few have been adopted widely. 10 Several lab-scale detection techniques have been reported with ppbv to pptv levels of sensitivity. 37 However, these have remained bench-sized instruments or laboratory curiosities, and have not transitioned into a commercially viable product for widespread use.…”
Section: Discussionmentioning
confidence: 99%
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“…[1][2][3][4][5][6][7] Although a variety of techniques for aquametry have been reported in the literature, 1,[8][9][10] only few have been adopted widely. 10 Several lab-scale detection techniques have been reported with ppbv to pptv levels of sensitivity. 37 However, these have remained bench-sized instruments or laboratory curiosities, and have not transitioned into a commercially viable product for widespread use.…”
Section: Discussionmentioning
confidence: 99%
“…Although the moisture LOD obtained using the PDHID-D2 did not match the higher sensitivity reported using TDLAS/NIR, 28 TDLAS hygrometers are expensive. 10 The range of RH values over which the PDHID-D2 was used overlapped with the range reported using competing technologies.…”
Section: Gaseous Aquametrymentioning
confidence: 99%
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