2022
DOI: 10.1007/978-981-16-1803-1_3
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Techniques for Thin Films of Advanced Materials

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“…PVD can be achieved by e-beam evaporation and Magnetron sputtering [ 231 ]. Magnetron sputtering is preferred over e-beam as it is directional, covers fewer steps, and forms shadow effect [ 232 ]. In magnetron sputtering, a magnetic field is configured parallel to the target surface for constraining the electron motion; thus, highly uniform coatings are yielded [ 233 ].…”
Section: Coatings and Their Current Statusmentioning
confidence: 99%
“…PVD can be achieved by e-beam evaporation and Magnetron sputtering [ 231 ]. Magnetron sputtering is preferred over e-beam as it is directional, covers fewer steps, and forms shadow effect [ 232 ]. In magnetron sputtering, a magnetic field is configured parallel to the target surface for constraining the electron motion; thus, highly uniform coatings are yielded [ 233 ].…”
Section: Coatings and Their Current Statusmentioning
confidence: 99%