Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Knapkiewicz, Paweł

doi:10.3390/mi10010025

Cited by 32 publications

(12 citation statements)

References 68 publications

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“…The chemical reaction of CsCl and BaN6 can be described as follows [37] It is difficult to obtain a homogeneous mixture of CsCl and BaN6 by dry mixing. However, the solute in the solution is uniformly distributed.…”

Section: Chemical Reaction Of Cscl With Ban6 and Cs Evaporationmentioning

confidence: 99%

Wafer-Level Filling of MEMS Vapor Cells Based on Chemical Reaction and Evaporation

Guo

Meng²,

Dan

et al. 2022

Micromachines

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Micro-electro-mechanical system (MEMS) vapor cells are key components for sensors such as chip-scale atomic clocks (CSACs) and magnetometers (CSAMs). Many approaches have been proposed to fabricate MEMS vapor cells. In this article, we propose a new method to fabricate wafer-level filling of MEMS vapor cells based on chemical reaction and evaporation. The Cs metals are firstly obtained through the chemical reaction between cesium chloride and barium azide in a reservoir baseplate. Then, the Cs metals are evaporated to the preform through the microchannel plate and condensed on the inner glass surface of the preform. Lastly, the MEMS vapor cells are filled with buffer gas, sealed by anodic bonding, and mechanically diced into three dimensions: 5 mm × 5 mm × 1.2 mm, 4 mm × 4 mm × 1.2 mm, and 3 mm × 3 mm × 1.2 mm. The full width at half maximum (FWHM) linewidth of the coherent population trapping (CPT) signal of the MEMS vapor cells is found to be 4.33 kHz. The intrinsic linewidth is about 1638 Hz. Based on the CPT signal, the frequency stability is 4.41 × 10−12@1000 s. The results demonstrate that the presented method of the wafer-level filling of MEMS vapor cells fulfills the requirements of sensors such as CSACs.

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Section: Chemical Reaction Of Cscl With Ban6 and Cs Evaporationmentioning

confidence: 99%

Wafer-Level Filling of MEMS Vapor Cells Based on Chemical Reaction and Evaporation

Guo

Meng²,

Dan

et al. 2022

Micromachines

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“…MEMS alkali vapor cells can be fabricated in several ways [ 19 ]. Silicon-glass technology dominates, but low temperature co-fired ceramics (LTCC) ceramic-based solutions have been described in the literature.…”

Section: Mems Alkali Vapor Optical Cell Technologymentioning

confidence: 99%

Alkali Vapor MEMS Cells Technology toward High-Vacuum Self-Pumping MEMS Cell for Atomic Spectroscopy

Knapkiewicz

2018

Micromachines

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The high-vacuum self-pumping MEMS cell for atomic spectroscopy presented here is the result of the technological achievements of the author and the research group in which he works. A high-temperature anodic bonding process in vacuum or buffer gas atmosphere and the influence of the process on the inner gas composition inside a MEMS structure were studied. A laser-induced alkali vapor introduction method from solid-state pill-like dispenser is presented as well. The technologies mentioned above are groundbreaking achievements that have allowed the building of the first European miniature atomic clock, and they are the basis for other solutions, including high-vacuum optical MEMS. Following description of the key technologies, high-vacuum self-pumping MEMS cell construction and preliminary measurement results are reported. This unique solution makes it possible to achieve a 10−6 Torr vacuum level inside the cell in the presence of saturated rubidium vapor, paving the way to building a new class of optical reference cells for atomic spectroscopy. Because the level of vacuum is high enough, experiments with cold atoms are potentially feasible.

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“…Meanwhile, in recent years there has been growing interest in the development of chip-scale and miniaturized atomic sensors [29]. Fabrication techniques based on micromachined structures in silicon, which usually employ anodic bonding between Si and Borofloat glass substrates to make MEMS vapor cells [30], have shown great scalability and stability properties. Alternatively, photolithography of a photoresist, in combination with etching and glassblowing techniques, has been used to fabricate atomic microchannels [31] and, more recently, nanostructured alkali-metal vapor cells [32,33].…”

Section: Introductionmentioning

confidence: 99%

Laser-written vapor cells for chip-scale atomic sensing and spectroscopy

Lucivero,

Zanoni,

Corrielli

et al. 2022

Preprint

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We report the fabrication of alkali-metal vapor cells using femtosecond laser machining. This laser-written vapor-cell (LWVC) technology allows arbitrarily-shaped 3D interior volumes and has potential for integration with photonic structures and optical components. We use nonevaporable getters both to dispense rubidium and to absorb buffer gas. This enables us to produce cells with sub-atmospheric buffer gas pressures without vacuum apparatus. We demonstrate sub-Doppler saturated absorption spectroscopy and single beam optical magnetometry with a single LWVC. The LWVC technology may find application in miniaturized atomic quantum sensors and frequency references.

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Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Cited by 32 publications

References 68 publications

Wafer-Level Filling of MEMS Vapor Cells Based on Chemical Reaction and Evaporation

Wafer-Level Filling of MEMS Vapor Cells Based on Chemical Reaction and Evaporation

Alkali Vapor MEMS Cells Technology toward High-Vacuum Self-Pumping MEMS Cell for Atomic Spectroscopy

Laser-written vapor cells for chip-scale atomic sensing and spectroscopy

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