Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components

Bargiel, Sylwester; Barański, Maciej; Wiemer, Maik; Frömel, Jörg; Wang, Wei Shan; Gorecki, Christophe

doi:10.3390/mi10030185

Cited by 3 publications

(2 citation statements)

References 23 publications

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“…Additionally, micro-lens' fabrication is a fundamental component exploited more and more for a wide range of applications such as micro-actuators, sensors, and bio-devices. [38][39][40] Various techniques for manufacturing micro-lenses using natural or replication processes have been studied and commercialized. Nevertheless, most technologies are too expensive for mass production due to the complexity and high cost of the equipment and the process.…”

Section: Introductionmentioning

confidence: 99%

Screening of spherical moulds manufactured isotropically in plasma etching conditions

Herth

Belharet

Edmond

et al. 2021

Contributions to Plasma Physics

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Micro-moulding is a critical rapid prototyping process chain used for a wide range of applications. This study demonstrates that it is possible to manufacture mould at low excitation frequency plasma (380 kHz), on a silicon substrate using fluorinated chemistry. According to the mask aperture designed and process time, the cavities profile characteristics, depending on the plasma chemistry, were analysed to predict the degree of anisotropy and the curvature. We show the possibility of creating curvature shapes with a desirable conic constant k of 1.25. In particular, we highlighted the smallest aperture sizes are more attractive for replicating optical micro-lens arrays using silicon moulds. Otherwise, the largest aperture sizes gain more attention for optoelectronics, microsystems, and microfluidics applications.

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Section: Introductionmentioning

confidence: 99%

Screening of spherical moulds manufactured isotropically in plasma etching conditions

Herth

Belharet

Edmond

et al. 2021

Contributions to Plasma Physics

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“…More recently, many types of MEMS scanning mirrors have been developed, covering a wide range of applications from micrometer-scale array-type components to large scanners for high-resolution imaging [4]. Thus, numerous optical imaging techniques such as confocal microscopy [5,6], multiphoton microscopy [7,8], and Optical Coherence Tomography (OCT) [9][10][11] have become important diagnostic tools in biomedicine, particularly offering a platform for endoscopic imaging. These MEMS scanners successfully replaced the bulky and high power consuming galvanometer scanners, providing compact, low cost, and low power consumption solutions for high speed beam steering.…”

Section: Introductionmentioning

confidence: 99%

MEMS Scanning Mirrors for Optical Coherence Tomography

Gorecki

Bargiel

2020

Photonics

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This contribution presents an overview of advances in scanning micromirrors based on MEMS (Micro-electro-mechanical systems) technologies to achieve beam scanning for OCT (Optical Coherence Tomography). The use of MEMS scanners for miniaturized OCT probes requires appropriate optical architectures. Their design involves a suitable actuation mechanism and an adapted imaging scheme in terms of achievable scan range, scan speed, low power consumption, and acceptable size of the OCT probe. The electrostatic, electromagnetic, and electrothermal actuation techniques are discussed here as well as the requirements that drive the design and fabrication of functional OCT probes. Each actuation mechanism is illustrated by examples of miniature OCT probes demonstrating the effectiveness of in vivo bioimaging. Finally, the design issues are discussed to permit users to select an OCT scanner that is adapted to their specific imaging needs.

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Miniaturized microsphere-assisted microscopy

Perrin

Pierron

Gérard

et al. 2023

Applied Physics Letters

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Microsphere-assisted microscopy is a sub-diffraction-limited imaging technique, which uses dielectric microspheres to collect the near-field information of an object. In this work, the bulk of the classical microsphere-based system is reduced by the simple introduction of a ball lens. The miniaturized imaging system has been designed and vertically assembled. Performance of the proposed dual-sphere system is quantified through numerical simulations and experiments. A theoretical impulse response with a full width at half maximum smaller than half of the wavelength is reached in air. As a proof of concept, 500-nm-period standard gratings and gold nanoparticles are observed without a classical objective, validating a sub-wavelength resolution with a high imaging quality and low aberrations over the field of view.

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Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components

Cited by 3 publications

References 23 publications

Screening of spherical moulds manufactured isotropically in plasma etching conditions

Screening of spherical moulds manufactured isotropically in plasma etching conditions

MEMS Scanning Mirrors for Optical Coherence Tomography

Miniaturized microsphere-assisted microscopy

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