2018
DOI: 10.21685/2307-5538-2018-1-6
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Technology of Fabrication of Sensitive Element of the Differential Fiber-Optic Acceleration Sensor

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“…For measuring channels based on one FOS, such a solution is not economically feasible. A distinctive feature of the proposed methods, designs and technologies in comparison with the known [2,14,20] is the modularity of the FOS design, consisting of a microelectromechanical sensitive element and an optical unit.…”
Section: Discussion Of the Research Results Of The Development Of Multifunctional Fiber-optic Pressure And Temperature Sensorsmentioning
confidence: 99%
“…For measuring channels based on one FOS, such a solution is not economically feasible. A distinctive feature of the proposed methods, designs and technologies in comparison with the known [2,14,20] is the modularity of the FOS design, consisting of a microelectromechanical sensitive element and an optical unit.…”
Section: Discussion Of the Research Results Of The Development Of Multifunctional Fiber-optic Pressure And Temperature Sensorsmentioning
confidence: 99%