Tellurium sputtered thin films as NO2 gas sensors

Siciliano, Tiziana; Giulio, Massimo Di; Tepore, M.; Filippo, Emanuela; Micocci, G.; Tepore, A.

doi:10.1016/j.snb.2008.08.018

Cited by 42 publications

(27 citation statements)

References 14 publications

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“…Tellurium (Te) is another kind of material that can be used as active element in gas sensors operated at room temperature. Te can detect a variety of gases including NH 3 , H 2 S, CO, and NO 2 . In early reports, Te‐based thin films fabricated by thermal evaporation or RF sputtering have been investigated for room‐temperature gas sensors.…”

Section: Materials For Gas Sensing21single‐element Materialsmentioning

confidence: 99%

Nanostructured Materials for Room‐Temperature Gas Sensors

et al. 2015

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Sensor technology has an important effect on many aspects in our society, and has gained much progress, propelled by the development of nanoscience and nanotechnology. Current research efforts are directed toward developing high-performance gas sensors with low operating temperature at low fabrication costs. A gas sensor working at room temperature is very appealing as it provides very low power consumption and does not require a heater for high-temperature operation, and hence simplifies the fabrication of sensor devices and reduces the operating cost. Nanostructured materials are at the core of the development of any room-temperature sensing platform. The most important advances with regard to fundamental research, sensing mechanisms, and application of nanostructured materials for room-temperature conductometric sensor devices are reviewed here. Particular emphasis is given to the relation between the nanostructure and sensor properties in an attempt to address structure-property correlations. Finally, some future research perspectives and new challenges that the field of room-temperature sensors will have to address are also discussed.

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Section: Materials For Gas Sensing21single‐element Materialsmentioning

confidence: 99%

Nanostructured Materials for Room‐Temperature Gas Sensors

et al. 2015

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“…The similar results have been reported in Refs. [21,22]. To study the effect of humidity on the sensing properties of the Te films, the prepared sensors are exposed to 8 ppm H 2 S gas at about 30% and 60% RH (relative humidity).…”

Section: Resultsmentioning

confidence: 99%

Thickness and UV irradiation effects on the gas sensing properties of Te thin films

Manouchehrian

Larijani

Elahi

2015

Materials Research Bulletin

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“…Investigators have also studied other SMO films such as SnO 2 [103,115-126], ZnO [127-134], Te-oxide [135,136], Mo [137], gold [107], Pt [108], copper [138], and indium oxides [111,112]. Tin oxide thin films deposited onto different substrates such as Pyrex glass, Corning 7059 glass, and fused quartz showed a resistance change in the presence of 500 ppm of NO 2 toxic gas at a working temperature of 350 °C and a sensitivity threshold of about 5 ppm at the same temperature [139].…”

Section: Applications In Environmental Monitoring and Gas Detectionmentioning

confidence: 99%