“…When the pressure is low (e.g., 0.8 Pa), the number of crystal nuclei per unit volume is large, and the bonding between crystal grains is not dense, resulting in high surface roughness. As the pressure increases, voids are reduced to increase the compactness and uniformity of the films, to smooth the surfaces, and lower the roughness [40]. The To investigate the grain growth and crystal structure of the MoS 2 films, we analyzed the peak half width of the (202) plane of MoS 2 on the basis of Bragg's equation (Equation 1), the cubic system distance in Equation 2, and Scherrer's equation (Equation 3), which can be used to calculate the interplanar spacing (d), lattice constant (a), and average grain size (D) [35], respectively:…”