Temperature dependence of an electron attachment to chlorine molecules

Golovitskii, A. P.

doi:10.1134/1.1259672

Cited by 9 publications

(3 citation statements)

References 11 publications

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“…Theoretical analyses of electron attachment to Cl 2 have been reported by Friedman et al [10], Fabrikant et al [21], Golovitskij [22], Leininger and Gadéa [23], Kolorenč and Horáček [24] and Ruf et al [20]. All these reports describe the formation of the 0 eV peak in the DEA channel via p-wave capture in the electron attachment process.…”

Section: Introductionmentioning

confidence: 94%

Probing the resonant states of Cl₂using velocity slice imaging

Gope

Prabhudesai

Mason

et al. 2015

J. Phys. B: At. Mol. Opt. Phys.

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The negative ion resonances in molecular chlorine are probed using velocity slice imaging of the Cl− fragment produced in dissociative electron attachment (DEA). The capability of the velocity slice imaging to cover the entire 360° allows us to obtain clear evidence for the presence of the resonance in the 2.5 eV DEA peak along with the presence of The resonance is expected to be the contributor only to the 0 eV DEA peak. Its presence in the 2.5 eV DEA peak calls for a relook at the theoretical calculations which have not identified any resonance in the 2.5 eV peak. We also identify the presence of the and resonances in the 5.6 eV peak. The momentum images indicate no signature of a resonant contribution in the dipolar dissociation region up to 80 eV.

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Section: Introductionmentioning

confidence: 94%

Probing the resonant states of Cl₂using velocity slice imaging

Gope

Prabhudesai

Mason

et al. 2015

J. Phys. B: At. Mol. Opt. Phys.

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“…This energy difference plus the incident electron energy, E inc + 1.13 eV, is divided between the fragments. The cross section for polar dissociation, with a threshold energy of 11.9 ± 0.2 eV [36], is taken from Golovitskii [43]. The cross sections for electron scattering, the three electron impact ionization processes, dissociative attachment and polar dissociation are shown in figure 1.…”

Section: The Reaction Setmentioning

confidence: 99%

A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

Huang

Guðmundsson

2013

Plasma Sources Sci. Technol.

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Here we demonstrate the oopd1 (object-oriented plasma device for one dimension) particle-in-cell/Monte Carlo simulation tool for a capacitively coupled chlorine discharge with a comprehensive reaction set. We apply a hybrid approach where a global model determines the dissociation fraction of the discharge. The simulation results are compared with available experimental measurements and good agreement is achieved. We explore a typical capacitively coupled chlorine discharge using oopd1 and obtain key plasma parameters, including particle density, effective electron temperature, electron energy probability function and ion energy and angular distributions for both Cl + and Cl + 2 ions. The dependence of the plasma parameters on the discharge pressure is systematically investigated. As the pressure increases from 5 to 100 mTorr, the heating mechanism evolves from both stochastic and Ohmic heating to predominantly Ohmic heating and the electron heating outweighs the ion heating at high pressures. Also, the density profile for Cl + 2 and Cl − ions becomes flat in the bulk region and the electronegativity increases with increasing pressure. The creation of Cl + ions in the sheath region is mainly due to conversion from Cl + 2 ions to Cl + ions through non-resonant charge exchange, while in the bulk region the creation of Cl + ions is mainly ascribed to electron impact ionization processes.

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“…The cross section for electron impact polar dissociation of the chlorine molecule, reaction (R9), was measured (as a part of a total negative ion formation cross section) by Kurepa and Belić [47]. Golovitskii [50] made an effort to minimize the overlap of polar dissociation and dissociative attachment in the cross section measured by Kurepa and Belić [47] and gave a revised cross section for polar dissociation, which is the cross section that we have used for polar dissociation. The cross sections for electron impact vibrational excitation, reactions (R10)-(R15), were calculated by Kolorenč and Koráček [51].…”

Section: Particle Balancementioning

confidence: 99%

A global (volume averaged) model of a chlorine discharge

Thorsteinsson

Guðmundsson

2009

Plasma Sources Sci. Technol.

106

183

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A steady state global (volume averaged) model is developed for the chlorine discharge using a revised reaction set. Various calculated plasma parameters are compared with measurements found in the literature, showing a good overall agreement. The reaction rates for the various reactions are evaluated in the pressure range 1-100 mTorr. In particular, we explore the dissociation process as well as the creation and destruction of the negative ions Cl − . The discharge is highly dissociated throughout the pressure range explored, 1-100 mTorr, even when the absorbed power is low. The mechanism for Cl creation is complex. Although electron impact dissociation dominates with roughly 60-65% contribution, mutual neutralization of positive and negative ions and dissociative electron attachment are important contributors to the production of Cl atoms at high pressure. The electronegativity increases rapidly with decreasing dissociation fraction since the Cl − ions are created entirely by dissociative electron attachment, predominantly from Cl 2 (v = 0), but also up to 14% from Cl 2 (v > 0) at 100 mTorr. The negative ion Cl − is lost almost entirely through mutual neutralization with Cl + 2 at high pressure while Cl + has a significant contribution at low pressure.

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Temperature dependence of an electron attachment to chlorine molecules

Cited by 9 publications

References 11 publications

Probing the resonant states of Cl₂using velocity slice imaging

Probing the resonant states of Cl₂using velocity slice imaging

A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

A global (volume averaged) model of a chlorine discharge

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Temperature dependence of an electron attachment to chlorine molecules

Cited by 9 publications

References 11 publications

Probing the resonant states of Cl2using velocity slice imaging

Probing the resonant states of Cl2using velocity slice imaging

A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

A global (volume averaged) model of a chlorine discharge

Contact Info

Product

Resources

About

Probing the resonant states of Cl₂using velocity slice imaging

Probing the resonant states of Cl₂using velocity slice imaging