Atomic beam techniques are presently being used in many branches of surface physics such as studies of the particle-surface physisorption potential, surface structure, surface phonons, nucleation and growth on metal and insulator surfaces, surface diffusion and accommodation and sticking of molecules. This review concentrates on diffractive phenomena from surfaces, which up to now were investigated mainly with helium. The theoretical background for diffraction calculations is outlined and representative examples of different applications are given. The main subjects covered are: structural determinations of chemisorbed and physisorbed systems, investigations of disordered surfaces, selective adsorption resonances, diffusion and nucleation studies and investigations of growth and phase transitions on surfaces. Diffraction results obtained with Ne, Ar, H 2 and D 2 are also summarized.