Temperature Dependence of Wet Oxidation Process Based on VCSEL

Lei, 陈磊 Chen; Yan, 罗妍 Luo; Yuan, 冯源 Feng; Changling, 晏长岭 Yan; Jie, 范杰 Fan; Xin, 高欣 Gao; Yonggang, 邹永刚 Zou; Yongqin, 郝永芹 Hao

doi:10.3788/cjl202047.0701023

中国激光

2020

DOI: 10.3788/cjl202047.0701023

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Temperature Dependence of Wet Oxidation Process Based on VCSEL

陈磊 Chen Lei¹,

罗妍 Luo Yan²,

冯源 Feng Yuan³

et al.

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2024

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氧化限制型795 nm垂直腔面发射激光器

Nie Yuwei,

Li Wei,

Lü Jiagang

et al. 2024

中国激光

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Objective The vertical cavity surfaceemitting laser (VCSEL) is a type of semiconductor laser that emits light perpendicular to the substrate surface. The VCSEL, as a chiplevel atomic clock light source, must possess good singlemode characteristics. Thus the individual frequency required by the atomic clock can be precisely modulated to stimulate the atomic clock s operation, and the atomic clock is ensured not to absorb other signals during the modulation process. The practical design necessitates confining the electric and optical fields of the VCSEL to secure strong singlemode characteristics, while also optimizing the epitaxial structure of the device.This study aims to develop a 795 nm VCSEL device with excellent power characteristics, capable of functioning at high temperatures up to 380 K, and achieving a fundamental mode output in the desired wavelength range.Methods First, the quantum well structure is designed using straincompensated quantum well band theory and the Kronig -Penney

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氧化限制型795 nm垂直腔面发射激光器

Nie Yuwei,

Li Wei,

Lü Jiagang

et al. 2024

中国激光

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垂直腔面发射半导体激光器氧化优化研究

Chen Zhongbiao,

Cui Bifeng,

Zheng Xiangrui

et al. 2024

中国激光

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Objective Vertical cavity surfaceemitting lasers (VCSELs) have advantages such as a single longitudinal mode, a low threshold, and ease of twodimensional integration. VCSELs have been widely used in data transmission, optical communication, and threedimensional sensing. Oxidation is the most common process for oxideconfined VCSELs. AlGaAs materials with high Al contents are oxidized via wet oxidation to form oxide apertures of aluminum oxide, and the structures of oxide apertures with different shapes

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Temperature Dependence of Wet Oxidation Process Based on VCSEL

Cited by 2 publications

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氧化限制型795 nm垂直腔面发射激光器

氧化限制型795 nm垂直腔面发射激光器

垂直腔面发射半导体激光器氧化优化研究

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