This study demonstrated the electrochemical deposition of Mn-doped ZnO films under hydrothermal conditions at 130 • C in 50% v/v DMSO-H 2 O mixture. X-ray diffraction analysis showed that the deposition of the ZnO structures was along (002) direction. However, the presence of Mn 2+ affected the thickness of ZnO structures and we believe that the interaction of Mn 2+ with the nonpolar surface of ZnO restricts lateral growth. Mn appears in the mixed oxide state in ZnO lattice. The photoluminescence spectra of the films show only UV emission indicating high crystal quality. The blueshift of the UV emission is observed after the introduction of Mn impurity into the ZnO lattice. The surface morphology, lattice structure, Mn content, chemical binding characteristics, and optical properties of the deposits were examined by scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy and photoluminescence spectroscopy, respectively.