2019
DOI: 10.1038/s41598-019-52871-6
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Temperature-dependent photoluminescence properties of porous fluorescent SiC

Abstract: A comprehensive study of surface passivation effect on porous fluorescent silicon carbide (SiC) was carried out to elucidate the luminescence properties by temperature dependent photoluminescence (PL) measurement. The porous structures were prepared using an anodic oxidation etching method and passivated by atomic layer deposited (ALD) Al2O3 films. An impressive enhancement of PL intensity was observed in porous SiC with ALD Al2O3, especially at low temperatures. At temperatures below 150 K, two prominent PL e… Show more

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Cited by 44 publications
(32 citation statements)
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“…Deposition of PAA on porous SiC surface improves the mechanical adhesion. The porous layer is fabricated by an anodic oxidation process [24,25]. The PL emission from the PAA on a porous SiC is shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Deposition of PAA on porous SiC surface improves the mechanical adhesion. The porous layer is fabricated by an anodic oxidation process [24,25]. The PL emission from the PAA on a porous SiC is shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Moreover, porous structures fabricated in fluorescent SiC can emit simultaneous blue–green light, which is attributed to surface-defects-related emissions [ 12 , 13 , 14 ]. Passivation by atomic layer-deposited (ALD) dielectric films dramatically increased the emission intensity of the porous fluorescent SiC layer [ 15 , 16 ]. Therefore, it is expected that combining the yellow–orange emission from fluorescent SiC with the blue–green light in the porous structures will result in the emission of white light with a high color-rendering index [ 5 , 17 ].…”
Section: Introductionmentioning
confidence: 99%
“…The enhanced luminescence of porous 6H-SiC compared to bulk 6H-SiC were observed at both 5 K and 300 K temperature [9]. Lu et al [10,11] prepared N-B co-doped 6H-SiC with 10 µm porous surface structure by anodic oxidation method. After passivation with 20 nm thick Al 2 O 3 , the PL intensity from the porous layer was significantly enhanced by a factor of more than 1225 [10,11].…”
Section: Introductionmentioning
confidence: 99%
“…Lu et al [10,11] prepared N-B co-doped 6H-SiC with 10 µm porous surface structure by anodic oxidation method. After passivation with 20 nm thick Al 2 O 3 , the PL intensity from the porous layer was significantly enhanced by a factor of more than 1225 [10,11]. Fluorescent SiC with porous surface can be used for high performance and rare-earth element free white light emitting applications [10,11].…”
Section: Introductionmentioning
confidence: 99%
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