2007
DOI: 10.1134/s1063784207120043
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Temperature measurement of a surface exposed to a low-temperature plasma flux

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Cited by 6 publications
(3 citation statements)
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“…The choice of a technology depends on the focused radiation wave length, focusator's material and required laser power. Chronologically the following methods became widely used: hardbaking of dichromated gelatin 39 , dark growth in layers of liquid polymerizable compositions 40 , layer-by-layer building-up of photoresist 41 , plasmochemical and chemically-assisted ion beam etching, electron-beam lithography [42][43][44][45][46][47][48][49] , NC cut 50-51 , plasmon nanolithography 52-53 etc. The choice of the best diffractive microrelief formation method for concrete internal parameters (in this case parameters of discretization and quantization of the phase function) of a problem is effectively made on the basis of computational experiment results.…”
Section: Technologies Of Diffractive Microrelief Formationmentioning
confidence: 99%
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“…The choice of a technology depends on the focused radiation wave length, focusator's material and required laser power. Chronologically the following methods became widely used: hardbaking of dichromated gelatin 39 , dark growth in layers of liquid polymerizable compositions 40 , layer-by-layer building-up of photoresist 41 , plasmochemical and chemically-assisted ion beam etching, electron-beam lithography [42][43][44][45][46][47][48][49] , NC cut 50-51 , plasmon nanolithography 52-53 etc. The choice of the best diffractive microrelief formation method for concrete internal parameters (in this case parameters of discretization and quantization of the phase function) of a problem is effectively made on the basis of computational experiment results.…”
Section: Technologies Of Diffractive Microrelief Formationmentioning
confidence: 99%
“…For making of designed focusators many methods and technologies of diffractive microrelief formation were developed [39][40][41][42][43][44][45][46][47][48][49][50][51][52][53] . The choice of a technology depends on the focused radiation wave length, focusator's material and required laser power.…”
Section: Technologies Of Diffractive Microrelief Formationmentioning
confidence: 99%
“…В такой ситуации ТНП может быть определена путём решения прямой задачи теплопроводности, в которой в качестве одного из граничных условий задачи теплопроводности используется измеренная температура поверхности токоведущей шины, а в качестве второго граничного условиярассчитанный тепловой поток, проходящий через контактную поверхность. Но даже в этой, достаточно простой, ситуации решения, представленные рядами [11], оказываются непригодными для реализации средствами современной микропроцессорной техники. Поэтому требуется проведение упрощений, декомпозиции моделей процесса нагрева и использование приближённых методов.…”
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