Temperature Variation of Actuation Voltage in Capacitive MEMS Switches

Abstract

Approved for public release; distribution is unlimited. STINFO FINAL REPORTThis work, resulting from Department of the Air Force contract number F33615-03-C-7003, has been submitted to IEEE for publication in the IEEE Microwave and Wireless Components Letters. If, published, IEEE may assert copyright. If so, the United States has for itself and others acting on its behalf an unlimited, paid-up, nonexclusive, irrevocable worldwide license. Any other form of use is subject to copyright restrictions. SENSORS DIRECTORATE AIR FORCE RESEARCH LABORATORY AIR FORCE MATERIEL COMMAND WRIGHT-PATTERSON AIR FORCE BASE, OH 45433-7320 NOTICEUsing Government drawings, specifications, or other data included in this document for any purpose other than Government procurement does not in any way obligate the U.S. Government. The fact that the Government formulated or supplied the drawings, specifications, or other data does not license the holder or any other person or corporation; or convey any rights or permission to manufacture, use, or sell any patented invention that may relate to them. This report has been reviewed and is releasable to the National Technical Information Service (NTIS). It will be available to the general public, including foreign nationals. The public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing the collection of information. Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing this burden, to Department of Defense, Washington Headquarters Services, Directorate for Information Operations and Reports (0704-0188), 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302. Respondents should be aware that notwithstanding any other provision of law, no person shall be subject to any penalty for failing to comply with a collection of information if it does not display a currently valid OMB control number. PLEASE DO NOT RETURN YOUR FORM TO THE ABOVE ADDRESS. REPORT DATE (DD-MM-YY)2 SPONSORING/MONITORING AGENCY REPORT NUMBER(S) AFRL-SN-WP-TP-2005-101 DISTRIBUTION/AVAILABILITY STATEMENTApproved for public release; distribution is unlimited. SUPPLEMENTARY NOTESReport contains color. This work, resulting from Department of the Air Force contract number F33615-03-C-7003, has been submitted to IEEE for publication in the IEEE Microwave and Wireless Components Letters. If, published, IEEE may assert copyright. If so, the United States has for itself and others acting on its behalf an unlimited, paid-up, nonexclusive, irrevocable worldwide license. Any other form of use is subject to copyright restrictions. ABSTRACTA simple theoretical model for temperature variation of actuation voltage for fixed-fixed beam switches is developed and applied to model capacitive RF MEMS switches. Measured data from the...

A novel capacitive RF MEMS switch design for low voltage applications

“…The permittivity ε 0 , and spring constant k, is fixed, thus the value of actuation voltage is completely depending upon the gap height between membrane and signal line [15].…”

Temperature dependent actuation voltage for longer MEMS switch lifetime

“…At the end of the OFF time, the dielectric is discharged to point D (Q D ) which can be calculated by Equation (4). For the next cycle, point D is Equation 5 shows the Pull-in voltage as a function of temperature caused by strain induced temperature variations [6]. This equation expresses the fundamental relationship of the switch pill-in voltage over temperature for a fixed-fixed beam MEMS switch.…”

“…The switch parameters used in this model are similar to those in [6]. The modeling result shows that pull-in voltage decreases when temperature increases.…”

“…As reported in [4], the temperature range in the electronic compartment in a commercial aircraft can vary from 30 degree Celsius to -10 degree Celsius. However, the required actuation voltage for MEMS switches also varies depends on the surrounding temperature condition [6]. Thus, the study of dielectric charging effect of RF MEMS switches operate under varying thermal condition is essential in order to improve the reliability.…”

Investigating the Performance of RF MEMS Switches

“…for a ange was increased; which implied that the RF contact pads were not fully closed. Goldsmith [9] attributes the increase in actuation voltage to an increasing stress in the actuators as a result of the difference in thermal expansion coefficients between the metal and the quartz substrate.…”