“…The choice to deposit titania (TiO 2 ) is stimulated by its unique features, such as a large direct band gap (3.2 eV), excellent chemical and thermal stability, electrical and optical properties. Moreover, ordered TiO 2 films have received much attention due to their potential application in various areas such as photoelectrochemical solar cells, electrocatalysts, sensors, high‐performance photocatalysts and so on . Furthermore, the ALD methodology proposed here can be potentially applied to other metal oxides, such as ZnO, Al 2 O 3 , SiO 2 , etc …”