“…These values are smaller than the modulus of bulk Au, reported as 78 GPa [22,23], but very consistent with modulus values reported for most tensile experiments with Au films in the literature [3,7,13,14,19,24,25]. Different authors have attributed the smaller elastic modulus to microstructure [14] and grain boundary relaxation [24], and, in the case of significantly smaller stiffness values, to film porosity [3,26]. Film porosity has been reported to be the reason for low elastic modulus, yield strength and tensile strength 3.…”