Tensile properties of aluminum/alumina multi-layered thin films

Mearini, Gerald T.; Hoffman, R. W.

doi:10.1007/bf02666408

Cited by 62 publications

(21 citation statements)

References 14 publications

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“…The contribution of native oxide to the strength was estimated using published data. 4 The result shows that the oxide effect on tensile strength is about 5% for the 60 nm film and smaller for thicker films, which is within standard deviations of data. Note that the tensile strength increases linearly with the inverse of the film thickness.…”

Section: Film Thickness Effect On Tensile Behaviorsupporting

confidence: 59%

Thickness dependent mechanical behavior of submicron aluminum films

Kang

1997

Journal of Elec Materi

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Mechanical behavior of thin metallic films has been investigated on aluminum films deposited on a flexible polyimide substrate. Aluminum thin films exhibit a higher tensile strength than bulk aluminum. As film thickness decreases from 480 to 60 nm tensile strength increases from 196 to 408 MPa. These mechanical behaviors are correlated with the microstructure and its evolution with the thickness of aluminum thin films. Films are consisted of fine columnar grains and average grain size increases monotonically with the film thickness. The volume fraction of (111)-textured grains increases and the dispersion of texture axis becomes narrow as the film thickens. The relative contributions of the film thickness, grain size, and texture to the strength of aluminum thin films are estimated using an empirical strengthening model. The result indicates that the high strength of aluminum thin films is due largely to their small grain size, followed by the strengthening due to the film thickness and texture.

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Section: Film Thickness Effect On Tensile Behaviorsupporting

confidence: 59%

Thickness dependent mechanical behavior of submicron aluminum films

Kang

1997

Journal of Elec Materi

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“…Such a nonlinear hysteretic response in the microplastic range may have the same origin as that observed under a loading-unloading condition of tensile testing of a free-standing film. 35 The microplastic flow in the films occurs in the stress range one or two orders of magnitude higher than that for the bulk shown by the broken curve. There is also a general tendency for the curves to shift to a higher stress as the film thickness decreases, thus indicating a suppression of microplastic flow in the thinner film.…”

Section: Conversion To Mechanical Responsesmentioning

confidence: 97%

Mechanical properties of thin-film materials evaluated from amplitude-dependent internal friction

Nishino

1999

Journal of Elec Materi

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A method is presented to evaluate the mechanical properties of thin-film materials from measurements of the amplitude-dependent internal friction. According to the constitutive equation, the internal friction in the film can be determined separately from measured damping of the film/substrate composite. The internal friction in aluminum films is dependent on the strain amplitude that is approximately two orders of magnitude higher than that for bulk aluminum. On the basis of the microplasticity theory, the amplitude-dependent internal friction in the film can be converted into the plastic strain as a function of effective stress on dislocation motion. The mechanical responses thus obtained for aluminum films show that the plastic strain of the order of 10 -9 increases nonlinearly with increasing stress. These curves tend to shift to a higher stress with decreasing film thickness and also with decreasing temperature, both indicating a suppression of microplastic flow. The microflow stress at a constant level of the plastic strain varies inversely with the film thickness, provided the grain size is larger than the film thickness. The film thickness effect in the microplastic range can be well explained by the bowing of a dislocation segment whose ends are pinned at the film surface and at the film/substrate interface.

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“…High strength, wear resistance, fatigue resistance W/ZrN [33] , Diamond like carbon (DLC)/Ti [34] , Al/Al 2 O 3 [14], [16] Ceramic/ceramic Thermal barrier and corrosion/wear resistant coatings, matrix in ceramic composites…”

Section: Nanolayered Materials Applications Important Attributes Systemsmentioning

confidence: 99%

“…Other metal-ceramic nanolayer system, which have been investigated, include Al-Al 2 O 3 [14,16] and Mo-Al 2 O 3 . [17] Mearini and Hoffman [16] produced pure Al, Al 2 O 3 , as well as Al-Al 2 O 3 nanolayer by PVD process. The Al 2 O 3 layers had an amorphous structure and had very low Young's modulus (107±110 GPa).…”

Section: Tensile Behaviormentioning

confidence: 99%

Mechanical Behavior of Multilayered Nanoscale Metal‐Ceramic Composites

et al. 2005

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Single and multilayered structures at nano‐length scale are very attractive materials due to their high strength, toughness, and wear resistance relative to conventional laminated composites. In this study, single layered Al, SiC, and multilayered Al/SiC composites were synthesized by DC/RF magnetron sputtering. The microstructure of the multilayered structures was characterized by scanning electron microscopy (SEM). The elastic and plastic behavior of single and multilayered materials was investigated by nanoindentation and tensile testing. For nanoindentation, an analytical model was employed to subtract the contribution of the Si substrate, in order to extract the true modulus of the films. Finite element simulations were employed to confirm the analytical predictions and to investigate the anisotropic elastic behavior of the multilayered composite. It was concluded that while indentation provides reasonable Young's modulus and hardness values in monolithic layers, it does not provide the true modulus of the multilayered materials because of their inherent anisotropy.

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Tensile properties of aluminum/alumina multi-layered thin films

Cited by 62 publications

References 14 publications

Thickness dependent mechanical behavior of submicron aluminum films

Thickness dependent mechanical behavior of submicron aluminum films

Mechanical properties of thin-film materials evaluated from amplitude-dependent internal friction

Mechanical Behavior of Multilayered Nanoscale Metal‐Ceramic Composites

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