1987
DOI: 10.1016/0040-6090(87)90022-8
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Tensimetric investigation of silicon nitride films

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Cited by 9 publications
(5 citation statements)
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“…The schematic diagram of the experimental setup, main characteristics of the experimental unit and the procedure of operation were described in more detail in our previous works [17,[20][21][22][23][24].…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The schematic diagram of the experimental setup, main characteristics of the experimental unit and the procedure of operation were described in more detail in our previous works [17,[20][21][22][23][24].…”
Section: Methodsmentioning
confidence: 99%
“…The selenium vapor pressure has been measured by the static method with quartz membrane-gauge manometers [19] using an isothermic [20] and anisothermic [21,22] procedure. The schematic diagram of the experimental setup, main characteristics of the experimental unit and the procedure of operation were described in more detail in our previous works [17,[20][21][22][23][24].…”
Section: Methodsmentioning
confidence: 99%
“…Since the experiments are performed in the closed volume, the static method does not restrict by time of equilibrium achievement and supplies with reliable quantitative information (p-T-x) even if the process goes very slowly. The main characteristics of the experimental unit and the procedure of operation were described in more detail in our previous works [15][16][17][18]. The limiting errors in values of pressure, temperature and solid phase composition were 133 Pa, 1 K and 0.01 formula units, accordingly.…”
Section: Methodsmentioning
confidence: 99%
“…Anisothermic procedure [16,17] means keeping quartz membrane at constant temperature (973 K) during the whole experiment. This procedure prevents the diffusion gases through the membrane and the loss of its elastic properties at the temperatures more than 1000 K. This method has some real advantages.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation