2017
DOI: 10.1364/ome.8.000050
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Terahertz integrated device: high-Q silicon dielectric resonators

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Cited by 40 publications
(30 citation statements)
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“…Although it promises the required selectivity and quantification, its shortcoming is the present Technology Readiness Level (TRL) restricting access to specialized laboratories. The integration of THz waveguides [42] and resonators [43] using silicon-based fabrication processes presents a longer-term perspective to construct a sensor operating on this principle that can be placed inside the package.…”
Section: Resultsmentioning
confidence: 99%
“…Although it promises the required selectivity and quantification, its shortcoming is the present Technology Readiness Level (TRL) restricting access to specialized laboratories. The integration of THz waveguides [42] and resonators [43] using silicon-based fabrication processes presents a longer-term perspective to construct a sensor operating on this principle that can be placed inside the package.…”
Section: Resultsmentioning
confidence: 99%
“…Therefore, a silicon platform is suitable for THz circuits to achieve simplicity and efficiency [ 139 ]. In addition to the THz silicon waveguides [ 62 , 63 , 140 , 141 , 142 , 143 ], many other passive functionalities for THz waves have been realized, such as high-Q silicon cavities [ 61 , 64 , 144 , 145 , 146 ], antennas [ 59 , 60 ], time-domain signal processing [ 147 ], and so on. To further reduce the waveguide loss, various waveguide structures are designed (see Figure 10 a).…”
Section: Silicon Photonics For Thz Techniquesmentioning
confidence: 99%
“…The high-Q cavities are fundamental to the implementation of compact sensors and filters [ 151 ]. As shown in Figure 10 b, all-silicon THz cavities with Q as high as 2839 and 1020 have been realized [ 61 , 64 ]. Based on this, several tunable devices have been realized so far, such as thermal tuning of silicon THz whispering-gallery-mode resonators [ 152 , 153 ].…”
Section: Silicon Photonics For Thz Techniquesmentioning
confidence: 99%
“…High‐ Q of about 2850 at 218.345 GHz was achieved due to the excitation of the WGM on waveguide‐coupled single‐mode racetrack rings and disk cavities. These high‐ Q resonators are useful for ultrahigh sensitive on‐chip terahertz sensors …”
Section: Whispering Gallery Modesmentioning
confidence: 99%