2022
DOI: 10.3390/mi13101601
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Terahertz Rectangular Waveguides by UV-LIGA with Megasonic Agitation

Abstract: This paper researches the fabrication of a WR2.8 terahertz rectangular waveguide operating at the frequency ranging from 260 GHz to 400 GHz via UV-LIGA technology (UV-lithography, electroplating, and molding). In the process, megasonic agitation is applied to improve the mechanical properties and internal surface roughness of the WR2.8 rectangular waveguide. The effects of process parameters on the properties of structures are discussed, and optimized parameters are obtained to achieve accurate geometry dimens… Show more

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Cited by 5 publications
(1 citation statement)
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“…Several micromachining techniques have proven themselves useful for fabricating passive waveguide components operating above 100 GHz: silicon (Si) micromachining [7], [8], SU-8 photoresist based micromachine technique [9], [10], and LIGA (Lithography, Electroplating, and Molding) [11], [12]. One general issue for micromachine-based methods is that they typically require time-consuming processing steps.…”
Section: Introductionmentioning
confidence: 99%
“…Several micromachining techniques have proven themselves useful for fabricating passive waveguide components operating above 100 GHz: silicon (Si) micromachining [7], [8], SU-8 photoresist based micromachine technique [9], [10], and LIGA (Lithography, Electroplating, and Molding) [11], [12]. One general issue for micromachine-based methods is that they typically require time-consuming processing steps.…”
Section: Introductionmentioning
confidence: 99%