1994
DOI: 10.1063/1.356221
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TeSeF films by TeSe-SeF6/Ar reactive sputtering for ablative optical recording

Abstract: Articles you may be interested inInterface structure modified by plasmasurface interaction and its effect on ablative hole opening process in a bilayer system of TeSeF film and a fluorocarbon subbing layer

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Cited by 8 publications
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“…19,20 A SeF 6 aAr plasma has been used to modify the surface of a TeSe alloy to produce ®lms for ablative write-once disks. 21 These technological applications of SF 6 and SeF 6 provide an additional motivation for investigations of the reactions of anions with SF 6 and SeF 6 , together with the closely related TeF 6 .…”
mentioning
confidence: 99%
“…19,20 A SeF 6 aAr plasma has been used to modify the surface of a TeSe alloy to produce ®lms for ablative write-once disks. 21 These technological applications of SF 6 and SeF 6 provide an additional motivation for investigations of the reactions of anions with SF 6 and SeF 6 , together with the closely related TeF 6 .…”
mentioning
confidence: 99%