Test Methods for Characterizing Piezoelectric Thin Films

Abstract

Two experimental techniques for quantifying MEMS-relevant material constants of piezoelectric thin films are presented. The first is an improved version of our recently developed 'plank method.' This technique is used to determine the product of the biaxial elastic modulus and the piezoelectric constant d 31 . The updated method is easier and more precise, and it utilizes the results of dynamic as well as improved static finite-element analyses. The second method is the bulge test, here emphasizing the special requirements of piezoelectric and fragile films. Results from both techniques applied to zinc oxide are presented.