Internal friction technique was used to investigate the microstructural stability of equal-channel angular pressed (ECAP) 9Cr1Mo steel (T91), Fe-18wt.%Cr alloy, and pure W. Several non-relaxation internal friction peaks are observed in three ECAP-strained specimens, which are related to the microstructural transition from a severely deformed state to a static recovery state of dislocations, and to recrystallized state. Along with the disappearance of the P1 peak, another relaxation internal friction peak P2 is observed during the second heating run only in Fe-18wt.%Cr alloy, and it does not disappear even during subsequent third heating run. This peak is not observed in T91 steel and W. The P2 peak is likely associated with a process of grain boundary (GB) sliding. Unlike T91, no abundant carbide precipitates distribute on GBs to pin GB and repulse GB sliding, thus, the P2 peak only occurs in Fe-18wt.%Cr alloy. It is concluded that high-temperature internal friction measurements are required to detect the grain boundary peak in pure W.