2014
DOI: 10.1063/1.4904077
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Texture evolution in nanocrystalline iron films deposited using biased magnetron sputtering

Abstract: Fe thin films were deposited on sodium chloride (NaCl) substrates using magnetron sputtering to investigate means of texture control in free standing metal films. The Fe thin films were studied using transmission electron microscopy equipped with automated crystallographic orientation microscopy. Using this technique, the microstructure of each film was characterized in order to elucidate the effects of altering deposition parameters. The natural tendency for Fe films grown on (100) NaCl is to form a randomly … Show more

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Cited by 20 publications
(9 citation statements)
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“…Fe films were sputter deposited on NaCl substrates and then floated onto molybdenum TEM grids. Details about the sputtering target, the sputtering process, purity of the films and the TEM sample preparation method are described elsewhere 28 , 35 . The films were then annealed in situ in a JEOL 2100 LaB 6 TEM using a Gatan heating stage at 873 K for 600 seconds (with a ramp rate of 30 degrees per minute), while monitoring the grain growth to achieve well-defined grain boundaries without eliminating the nanocrystalline microstructure.…”
Section: Methodsmentioning
confidence: 99%
“…Fe films were sputter deposited on NaCl substrates and then floated onto molybdenum TEM grids. Details about the sputtering target, the sputtering process, purity of the films and the TEM sample preparation method are described elsewhere 28 , 35 . The films were then annealed in situ in a JEOL 2100 LaB 6 TEM using a Gatan heating stage at 873 K for 600 seconds (with a ramp rate of 30 degrees per minute), while monitoring the grain growth to achieve well-defined grain boundaries without eliminating the nanocrystalline microstructure.…”
Section: Methodsmentioning
confidence: 99%
“…The iron films were deposited using magnetron sputtering of high purity iron onto sodium chloride substrates at Los Alamos National Laboratory 50 . Physical vapor deposition, like many bottom-up production methods for nanocrystalline materials, can result in the formation of non-equilibrium grain boundaries, especially when performed at low temperatures.…”
Section: Methodsmentioning
confidence: 99%
“…In this work, in-situ irradiation was performed in a transmission electron microscope (TEM) on freestanding nanocrystalline Fe samples of less than 100 nm grain size. To form the nanocrystalline samples, Fe films was sputter-deposited on NaCl substrates [6]. TEM micrographs of the samples after annealing showed both equilibrium and non-equilibrium (high local strain manifested by strong extinction bands) boundaries adjacent to each other ( Figure.1), thus enabling the comparison between both boundary types.…”
mentioning
confidence: 99%