1979
DOI: 10.1063/1.90953
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Textured silicon: A selective absorber for solar thermal conversion

Abstract: We have used reactive sputter etching to texture the surface of Si wafers. The texturing was in the form of pillars whose diameters and spacing were small compared with the useful solar wavelengths and whose heights were comparable with or larger than these wavelengths. The normal and hemispherical reflectances of textured wafers were measured. The solar absorptance was found to be 0.99 for wavelengths below 1.0 μm. Because of the sharp drop in absorptance for photon energies less than the energy gap, the over… Show more

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Cited by 93 publications
(38 citation statements)
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“…However, we have also seen that it is not possible to make a classical diffraction grating a good selective absorber for use in unpolarized light . This, together with promising experimental studies [2,[9][10][11][12][13][14][15][16][17][18], suggests the value of extending our results to crossed diffraction gratings in the small period limit .…”
Section: Discussionsupporting
confidence: 58%
See 1 more Smart Citation
“…However, we have also seen that it is not possible to make a classical diffraction grating a good selective absorber for use in unpolarized light . This, together with promising experimental studies [2,[9][10][11][12][13][14][15][16][17][18], suggests the value of extending our results to crossed diffraction gratings in the small period limit .…”
Section: Discussionsupporting
confidence: 58%
“…The traditional solution to this problem has been to place one or more anti-reflecting films on top of the interface . However, in recent years interest has been growing in another possibility-that of roughening or texturing the interface in such a fashion as to yield a reduced reflectance [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] . These studies have shown that the effects of roughening an interface are often similar to those obtained if a graded refractive index film is deposited on the interface .…”
Section: Introductionmentioning
confidence: 99%
“…18 In 2001, Zaidi et al published an extensive study on solar cells textured by reactive ion etching (RIE) in SF 6 and O 2 , paying, however, little attention to the actual dry etching process. 19 During the last decade, only few publications treated Black Silicon formation by RIE in SF 6 and O 2 .…”
mentioning
confidence: 99%
“…Chlorine-and uorine-based plasmas have been used to texture silicon wafers in this way, [111][112][113][114] with reectances less than 5% across the wavelength range of 300 nm to 1 mm demonstrated. In the case of maskless SF 6 /O 2 etching, deep texturing of silicon can be achieved by etching through a thin oxide layer.…”
Section: Random Subwavelength Texturingmentioning
confidence: 99%