“…Though the threshold depends on the liquid absorption, there is no linear correlation as the pyrene doping causes a sevenfold increase of the absorption but the threshold is reduced only little. The laser-induced decomposition of halogenated hydrocarbons, however, can result in halogen radicals [57,58,60,61] and can, therefore, contribute to the etching [58,62]. However, this does not explain the lower etch rate if at halogenated organics the same processes occur.…”