The adhesion problem for a microstructure with dimples

Tezuka, Shin-ichirou

doi:10.1109/sice.2002.1195428

Cited by 1 publication

(1 citation statement)

References 2 publications

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“…Therefore, the dimple structure is used to limit the plate-moving range without changing the plate dimensions and actuation torques. Besides, this structure can be used to avoid the stiction problem which takes place at the physical contact between the two layers [9,10].…”

Section: Dimple Designmentioning

confidence: 99%

Design and fabrication of MEMS logic gates

Tsai

Kuo

Lin

et al. 2008

J. Micromech. Microeng.

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This paper presents a novel design of MEMS logic gate that can perform Boolean algebra the same as logic devices that are composed of solid-state transistors. This MEMS logic gate design inherits all the advantages from MEMS switches and thus is expected to have more applications than MEMS switches. One unique feature of this device is that it can perform either NAND gate or NOR gate functions with the same mechanical structure but with different electrical interconnects. In a prototype design, the device is 250 µm long, 100 µm wide and has 1 µm gap. The experimental results show that this device can operate at 10/0 V and achieve the proposed logic functions. The resonant frequency of the device is measured roughly at 30 kHz. Due to no metal-to-metal contact in the current device, the logic functions of the design are verified through observations and video taping.

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Section: Dimple Designmentioning

confidence: 99%