1987
DOI: 10.1016/s0039-6028(87)81134-2
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The adsorption and thermal decomposition of acetylene on Si(100) and vicinal Si(100)9°

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Cited by 187 publications
(100 citation statements)
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“…For both adsorbed molecules the dimerized model is found to be more stable than the dimercleaved model as well as the tetra-model, showing that the carbon atoms of adsorbed C 2 H 2 and C 2 H 4 form sp 2 and sp 3 bonding, respectively. This result supports the majority of the experimental data [3][4][5][6][7][8] except that of a recent photoelctron imaging experiment, 7 where the tetra-model was proposed for adsorbed C 2 H 2 . Moreover, C 2 H 4 molecules favor adsorption on alternate Si dimers rather than on neighboring dimers along a dimer row, because of the repulsive hydrogenhydrogen interaction between adsorbed C 2 H 4 .…”
supporting
confidence: 86%
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“…For both adsorbed molecules the dimerized model is found to be more stable than the dimercleaved model as well as the tetra-model, showing that the carbon atoms of adsorbed C 2 H 2 and C 2 H 4 form sp 2 and sp 3 bonding, respectively. This result supports the majority of the experimental data [3][4][5][6][7][8] except that of a recent photoelctron imaging experiment, 7 where the tetra-model was proposed for adsorbed C 2 H 2 . Moreover, C 2 H 4 molecules favor adsorption on alternate Si dimers rather than on neighboring dimers along a dimer row, because of the repulsive hydrogenhydrogen interaction between adsorbed C 2 H 4 .…”
supporting
confidence: 86%
“…1,2 Despite a wealth of experimental [3][4][5][6][7][8] and theoretical 9-11 studies on both adsorbed molecules, several basic issues on the adsorption site, bonding characteristics, and saturation coverage are still controversial.…”
mentioning
confidence: 99%
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“…One reason for this could be the fact that acetylene molecules easily chemisorb nondissociatively on a Si͓100͔ surface at room temperature. 11 Another reason could be that interaction of low-energy argon ions is important before deposition starts. When the plasma is switched off before the acetylene addition is ceased, a film with a rather rough surface is the result.…”
Section: Deposition Of A-c:hmentioning
confidence: 99%
“…Thus precise characterisation of the C-C bond is very important in determining the adsorption site of the C 2 H 2 molecule. Unfortunately, as can be noted from the table, there is a large spread in C-C vibrational modes from HREELS measurements from different groups [23][24][25]. Although total energy calculations [26] suggest that di-σ -bond structure is the most stable, some of the metastable configurations, such as the tetra-σ model, are also possible.…”
Section: Hydrocarbon Moleculesmentioning
confidence: 99%