The adsorption of silane, disilane and trisilane on polycrystalline silicon: a transient kinetic study

Intrapellet diffusivities from TAP pulse responses via moment‐based analysis

“…realized with the TAP-2 reactor setup Gleaves et al, 1997 . TAP has been extensively applied in experimental studies on catalytic reaction mechanisms and other surface processes Correspondence concerning this article should be addressed to J. H. B. J. Hoebink. ŽKopinke et al, 1992;Coulson et al, 1993;Buyevskaya et al, 1994;Mallens et al, 1994;Weerts et al, 1996;Heitnes Hofstad et al, 1997;Pantazidis et al, 1998; . Heneghan et al, 1999;Mills et al, 1999;Dewaele et al, 1999 and the method has been numerically evaluated or simulated Ž .…”

Assessment of kinetic modeling procedures of TAP experiments

“…Knudsen flow has been experimentally verified in the TAP reactor by several groups [28,29,32,46] and an excellent agreement was found between the experimental data and Eq. (6) in all studies, which included a variation of the temperature, mass of the gas, reactor packing and reactor dimensions.…”

“…These models are usually validated by fitting inert gas curves and/or give simulations results. A number of studies deal with the modeling of the kinetics based on TAP data [29][30][31][32][33][34][35][36] or with the diffusion of molecules in microporous materials such as zeolites or carbons [67][68][69]. The latter models have been extended to biporous materials including first order reaction within the micropores [70,71].…”

“…Details on the set-up can be found in Gleaves et al [28]. Numerous studies deal with the modeling of TAP experiments [29][30][31][32][33][34][35][36][37].…”

Low pressure chemical vapor deposition of a-Si:H from disilane

“…Since the same types of atoms also occur in the solid, we may consider insertion reactions and other reactions at the surface. Weerts, de Croon, and Marin [40] measured products of the deposition reaction using quick pulses of reactants. The products included only excess reactants and hydrogen.…”