2006
DOI: 10.1016/j.surfcoat.2006.02.029
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The analysis of carbon bonding environment in HWCVD deposited a-SiC:H films by XPS and Raman spectroscopy

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Cited by 114 publications
(36 citation statements)
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“…Si-Si vibrational peaks can be seen around 160 and 480 cm -1 . The Raman spectrum of amorphous silicon consists of two distinct bands, near 160 cm −1 and 480 cm −1 , associated with transverse acoustic (TA) and transverse optic (TO) vibrational modes, respectively [10]. The appearance of the TA-like phonon mode is associated with the network formation of a-Si or the onset of layer growth.…”
Section: Resultsmentioning
confidence: 99%
“…Si-Si vibrational peaks can be seen around 160 and 480 cm -1 . The Raman spectrum of amorphous silicon consists of two distinct bands, near 160 cm −1 and 480 cm −1 , associated with transverse acoustic (TA) and transverse optic (TO) vibrational modes, respectively [10]. The appearance of the TA-like phonon mode is associated with the network formation of a-Si or the onset of layer growth.…”
Section: Resultsmentioning
confidence: 99%
“…10 shows the Si 2p and C 1s core level lines of the a-SiCN samples annealed at different temperatures. The positions of possible chemical bonds were labeled using dashed lines in the graphs, according to their energies [30,31]. Fig.…”
Section: Structure Analysismentioning
confidence: 99%
“…9,37 And for the Si 2p spectrum, the peaks at 101.8 eV and 102.5 eV belong to O-Si-C and Si-O bonds. 38,39 This indicates that Si elements migrate to the surface of the polymer matrix to form Si-O-Si structure of the char layer to protect the internal polymer of ZSEP in the combustion process. In addition, the formation of compounds which contain O-Si-C bond is also benecial to increasing the thermal stability and strength of the char layer.…”
mentioning
confidence: 99%