The angle dependent <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si147.svg" display="inline" id="d1e710"><mml:mi>Δ</mml:mi></mml:math>E effect in TiN/AlN/Ni micro cantilevers

Hähnlein, Bernd; Kellner, Maria; Krey, Maximilian; Nikpourian, Alireza; Pezoldt, Joerg; Michael, Steffen; Toepfer, Hannes; Krischok, S.; Tonisch, Katja

doi:10.1016/j.sna.2022.113784

Cited by 1 publication

(2 citation statements)

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“…[ 9 ] The Δ E effect is also influencing the quality factor of the investigated resonators leading to a shift of the quality factor at low‐magnetic fluxes. [ 7 ] However, damping mechanisms are not implemented in the proposed model. As a consequence, a detailed investigation of the observations has to be studied separately.…”

Section: Model Detailsmentioning

confidence: 99%

“…However, lead‐based compounds are environmentally critical and iron is an element that is usually avoided in semiconductor technology as it is forming deep traps within the band structure. In a recent study, [ 7 ] magnetoelectric sensors based on a TiN/AlN/Ni composite were investigated, avoiding the disadvantages of the aforementioned materials. Experimentally, such MEMS sensors are often based on sputtered layers due to cost effectiveness in a high‐volume production.…”

Section: Introductionmentioning

confidence: 99%

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Effect of Poly‐Crystallinity on the Magnetoelectric Behavior of TiN/AlN/Ni MEMS Cantilevers Investigated by Finite Element Methods

Hähnlein

Schaaf

Krischok

et al. 2023

Physica Status Solidi (a)

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Herein, magnetoelectric microelectromechanical system (MEMS) cantilevers are investigated on basis of a TiN/AlN/Ni laminate derived from experimental sensors using finite‐element simulations. With the anisotropic ΔE effect as an implication of the magnetocrystalline anisotropy, the lateral sensitivity of the sensor is studied for different nickel layer thicknesses and boundary conditions. It is found that above 60% of the cantilever length, the nickel is effectively not contributing to the sensor sensitivity anymore which is supported by the investigation of sensors with partial nickel coverage. The boundary condition of the magnetostrictive layer is found to affect the sensitivity of thick layers while it is negligible for thinning layers. Further investigations on basis of polycrystalline untextured nickel with slightly preferred orientations reveal a stronger effect on thin layers than on thicker ones. It is found to arise from relatively large crystals in the high‐sensitivity region near the clamping of the sensor. For thicker polycrystalline layers, the ΔE effect reproduces a characteristic based mainly on the (110) and (111) orientations while the (100) orientation appears to be underrepresented.

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Section: Model Detailsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%