An optical system was designed for use in automated inspection of superfinished spherical surfaces. Helium neon laser light is used to illuminate a small region on the spherical surface, and the light reflected from the surface is focused to a point on the face of a photodetector array capable of measuring light intensity as a function of both radial and angular coordinates. When an isolated defect such as a pit or scratch is illuminated, a characteristic diffraction pattern, centered about the focused spot, is observed in the plane of the detector array. Theoretical relations were derived which relate the intensities and sizes of the defect diffraction patterns to the type and dimensions of the isolated defect. The latter relations are important for determining defect sizes from photodetector measurements •of the diffraction pattern intensities and thereby establishing surface quality certification criteria. 4 THE BENDIX CORPORATION This report was prepared as an account of work sponsored KANSAS CITY DIVISION by the United States Government. Neither the United States P.O. BOX 1159 nor the United States Energy Research and Development Administration, nor any of their employees, nor any of their KANSAS CITY, MISSOURI 64141 contractors, subcontractors, or their employees, makes any warranty, express or implied, or assumes any legal liability or responsibility fbr the accuracy, completeness or 4 usefulness of any information, apparatus, product or process A prime contractor with the United disclosed, or represents that its use would not infringe pri-States Energy Research and vately owned rights. Development Administration