The angular distribution of sputtered silver atoms

Kundu, Sourav; Ghose, D.; Basu, Debashis; Karmohapatro, S.B.

doi:10.1016/0168-583x(85)90033-3

Cited by 21 publications

(16 citation statements)

References 17 publications

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“…For obliquely incident ions at relatively high ion energy, observed profiles also tend to be azimuthally symmetric. However, for lower ion energies the measured profiles tend to be asymmetric with increased sputtering in the forward direction [4][5][11][12]17,21 . Similar profiles have been modeled on a theoretical basis [24][25][26] .…”

Section: Introductionmentioning

confidence: 99%

“…In these devices, sputter erosion of grids and other components places a fundamental limitation on lifetimes. Additionally, sputtered particles from within the * 8 , collector plates [9][10] , mass spectrometry 11 , quartz crystal microbalance [2][3][4][5][6][12][13][14] , Rutherford backscattering [15][16] , radioactive tracers 17 , and cavity ring-down spectroscopy 18 . In this contribution we present sputter measurements of BN obtained by both weight loss and the quartz crystal microbalance (QCM).…”

Section: Introductionmentioning

confidence: 99%

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Total and Differential Sputter Yields of Boron Nitride Measured by Quartz Crystal Microbalance and Weight Loss (Preprint)

Rubin¹,

Topper²,

Yalin³

2007

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Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing this collection of information. Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing this burden to Department of Defense, Washington Headquarters Services, Directorate for Information Operations and Reports (0704-0188), 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302. Respondents should be aware that notwithstanding any other provision of law, no person shall be subject to any penalty for failing to comply with a collection of information if it does not display a currently valid OMB control number. PLEASE DO NOT RETURN YOUR FORM TO THE ABOVE ADDRESS. REPORT DATE (DD-MM-YYYY) SPONSORING / MONITORING AGENCY NAME(S) AND ADDRESS(ES) 10. SPONSOR/MONITOR'S ACRONYM(S)Air Force Research Laboratory (AFMC) AFRL/PRS SPONSOR/MONITOR'S Pollux Drive NUMBER(S)Edwards AFB CA 93524-7048 AFRL-PR-ED-TP-2007-406 DISTRIBUTION / AVAILABILITY STATEMENTApproved for public release; distribution unlimited (PA #07939A). ABSTRACTWe present results of differential sputter yield measurements of HBC and HBR grades of boron nitride due to bombardment by xenon ions. Total sputter yield measurements are made using a weight loss approach. Differential sputter yield measurements (of condensable components) are made using a quartz crystal microbalance (QCM). The QCM measurement allows full angular resolution, i.e. differential sputtering yield measurements are measured as a function of both polar angle and azimuthal angle. Measured profiles are presented for 100, 250, 350 and 500 eV Xe+ bombardment at 0º, 15º, 30º and 45º angles of incidence. We fit the measured profiles with Modified Zhang expressions using two free parameters: the total sputter yield, Y, and characteristic energy E*. Sputtering of HBC versus HBR grades of BN is compared, as is results of sputter measurements from the weight loss versus QCM approaches. Finally, effects of sample moisture absorption are considered. Abstract: We present results of differential sputter yield measurements of HBC and HBR grades of boron nitride due to bombardment by xenon ions. Total sputter yield measurements are made using a weight loss approach. Differential sputter yield measurements (of condensable components) are made using a quartz crystal microbalance (QCM). The QCM measurement allows full angular resolution, i.e. differential sputtering yield measurements are measured as a function of both polar angle and azimuthal angle. Measured profiles are presented for 100, 250, 350 and 500 eV Xe+ bombardment at 0º, 15º, 30º and 45º angles of incidence. We fit the measured profiles with Modified Zhang expressions using two free parameters: the total sputter yield, Y, and characteristic energy E*. Sputtering of HBC versus HBR grades of BN is compared, a...

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Total and Differential Sputter Yields of Boron Nitride Measured by Quartz Crystal Microbalance and Weight Loss (Preprint)

Rubin¹,

Topper²,

Yalin³

2007

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“…A partial list of nonoptical techniques for sputter measurements include weight loss [11], collector plates [12], quartz crystal microbalance [13,14], radioactive tracers [15], mass spectrometer [16], and Rutherford backscattering [17]. The full life testing referred to previously has generally employed weight loss or profilometry, neither of which is generally suitable for (near) real-time measurements.…”

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confidence: 99%

Sputter Erosion Sensor for Anode Layer-Type Hall Thrusters Using Cavity Ring-Down Spectroscopy

Yamamoto

Tao

Rubin

et al. 2010

Journal of Propulsion and Power

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We report the development of a sputter erosion monitoring system to study Hall thruster lifetime and contamination. The laser-based sensor uses the continuous-wave cavity ring-down spectroscopy technique and allows for in situ measurements in near-real time. The continuous-wave cavity ring-down spectroscopy technique diagnostic allows direct probing of sputter products in their ground state, thereby providing a reliable quantitative measure of their overall number density. Combining the number density of sputtered particles with their velocity allows determination of the flux of sputtered particles and erosion rate. We perform proof of principle experiments, in which sputtered manganese atoms from the acceleration channel of an anode layer-type Hall thruster are measured. The measurement strategy is to detect the manganese atoms via an absorption line from the ground state at a wavelength of 403.076 nm (air). The measured path-integrated number density of sputtered manganese atoms is 1:7 0:3 10 13 m 2 for an argon anode mass flow rate of 2:08 mg=s and a discharge voltage of 250 V. A finite element sputter model is used to compare the cavity ring-down spectroscopy results against validating mass loss measurements and shows good agreement. Nomenclature A ki = Einstein A coefficient, 1=s Abs = absorbance c = speed of light, 2:998 10 8 m=s E b = binding energy, J E i = energy of state i, J E k = energy of state k, J g i = degeneracy of state i g k = degeneracy of state k k = absorption coefficient, m 1 l = length of the ring-down cavity, m l abs = path length of absorbing species, m N i = lower-state concentration, m 3 R = mirror reflectivity St; = ring-down signal as a function of time and laser frequency S 0 = initial ring-down signal x = position along the optical axis, m = laser frequency, Hz ki = resonant frequency of transition, Hz = ring-down time, s 0 = empty cavity ring-down time, s

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“…Techniques such as weight loss 10) , collector plate 11) , quartz crystal microbalance 12,13) , radioactive tracers 14) , mass spectrometry 15) , and Rutherford backscattering 16) each have certain advantages and can be appropriate for material sputter characterization studies but none readily meets all of the above criteria. The need for a sensitive nonintrusive measurement suggests the use of optical techniques.…”

Section: Introductionmentioning

confidence: 99%

Development of Real-time Erosion Monitoring System for Hall Thrusters by Cavity Ring-Down Spectroscopy

Yamamoto

Tao

Yalin

2010

AEROSPACE TECHNOLOGY JAPAN

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Sputter monitoring system using continuous-wave cavity ring-down spectroscopy (cw-CRDS) was built for both lifetime assessment and contamination effects in Hall thrusters. We have performed measurements of sputtered manganese atoms from acceleration channel wall (stainless steel 316) in an anode layer type Hall thruster. The measurement strategy is based upon detection of manganese atoms via an absorption line from ground state at a wavelength of 403.076 nm. The path-integrated number density is 1.4 0.

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The angular distribution of sputtered silver atoms

Cited by 21 publications

References 17 publications

Total and Differential Sputter Yields of Boron Nitride Measured by Quartz Crystal Microbalance and Weight Loss (Preprint)

Total and Differential Sputter Yields of Boron Nitride Measured by Quartz Crystal Microbalance and Weight Loss (Preprint)

Sputter Erosion Sensor for Anode Layer-Type Hall Thrusters Using Cavity Ring-Down Spectroscopy

Development of Real-time Erosion Monitoring System for Hall Thrusters by Cavity Ring-Down Spectroscopy

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