The application of polyimide/silicon nitride dual passivation to AlxGa1−xN/GaN high electron mobility transistors

Lau, W. S.; Gunawan, S.; Tan, Joy B. H.; Singh, Bhupinder

doi:10.1016/j.microrel.2007.05.003

Microelectronics Reliability

2008

DOI: 10.1016/j.microrel.2007.05.003

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The application of polyimide/silicon nitride dual passivation to AlxGa1−xN/GaN high electron mobility transistors

W. S. Lau

S. Gunawan

Joy B. H. Tan

et al.

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Cited by 8 publications

References 21 publications

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Effects of Hydrogen Bonding in Silicon Nitride/Polyimide Passivation Bilayer in SiC Power Devices

Scandurra,

Bellocchi,

Arena

et al. 2024

Physica Status Solidi (a)

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Composition and morphology of two types of bilayers of plasma‐enhanced chemical vapor deposition hydrogened silicon nitride (SiNx:H) and polyimide (PI), as effcient barrier against moisture in SiC‐based power devices, are investigated. Two types of silicon nitrides are obtained by changing the flow ratios of the SiH4 and NH3 precursors. Rutherford Backscatterered analyses show that the Si/N ratio varies from 0.6 to 0.8. Elastic recoil detection analyses show that the sample with higher nitrogen content has a higher total bound hydrogen content of 7.8 × 1017 cm−2 with respect to the 7.1 × 1017 cm−2. Fourier‐transform infrared spectroscopy characterizations show Si–H group concentrations of 0.96 × 1017 and 6.86 × 1017 cm−2 and NH groups of 4.82 × 1017 and 2.28 × 1017 cm−2, respectively. Silicon nitride films with higher concentration of N–H groups show higher reactivity and permeability to water, making them less effective as a barrier layer. Atomic force microscopy analyses of a PI layer deposited on the nitride layer, SiNx:H/PI show for both type of samples a similar roughness, indicating planarization that can increase the adhesion of SiNx:H/PI and resistance to moisture. The delamination mechanism of the bilayer under pressure pot test conditions is proposed.

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Effects of Hydrogen Bonding in Silicon Nitride/Polyimide Passivation Bilayer in SiC Power Devices

Scandurra,

Bellocchi,

Arena

et al. 2024

Physica Status Solidi (a)

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Highly accurate thermal flow microsensor for continuous and quantitative measurement of cerebral blood flow

et al. 2015

Biomed Microdevices

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Cerebral blood flow (CBF) plays a critical role in the exchange of nutrients and metabolites at the capillary level and is tightly regulated to meet the metabolic demands of the brain. After major brain injuries, CBF normally decreases and supporting the injured brain with adequate CBF is a mainstay of therapy after traumatic brain injury. Quantitative and localized measurement of CBF is therefore critically important for evaluation of treatment efficacy and also for understanding of cerebral pathophysiology. We present here an improved thermal flow microsensor and its operation which provides higher accuracy compared to existing devices. The flow microsensor consists of three components, two stacked-up thin film resistive elements serving as composite heater/temperature sensor and one remote resistive element for environmental temperature compensation. It operates in constant-temperature mode (~2 °C above the medium temperature) providing 20 ms temporal resolution. Compared to previous thermal flow microsensor based on self-heating and self-sensing design, the sensor presented provides at least two-fold improvement in accuracy in the range from 0 to 200 ml/100 g/min. This is mainly achieved by using the stacked-up structure, where the heating and sensing are separated to improve the temperature measurement accuracy by minimization of errors introduced by self-heating.

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Development and application of a microfabricated multimodal neural catheter for neuroscience

Limnuson

et al. 2016

Biomed Microdevices

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We present a microfabricated neural catheter for real-time continuous monitoring of multiple physiological, biochemical and electrophysiological variables that are critical to the diagnosis and treatment of evolving brain injury. The first generation neural catheter was realized by polyimide-based micromachining and a spiral rolling packaging method. The mechanical design and electrical operation of the microsensors were optimized and tailored for multimodal monitoring in rat brain such that the potential thermal, chemical and electrical crosstalk among the microsensors as well as errors from micro-environmental fluctuations are minimized. In vitro cytotoxicity analyses suggest that the developed neural catheters are minimally toxic to rat cortical neuronal cultures. In addition, in vivo histopathology results showed neither acute nor chronic inflammation for 7 days post implantation. The performance of the neural catheter was assessed in an in vivo needle prick model as a translational replica of a "mini" traumatic brain injury. It successfully monitored the expected transient brain oxygen, temperature, regional cerebral blood flow, and DC potential changes during the passage of spreading depolarization waves. We envisage that the developed multimodal neural catheter can be used to decipher the causes and consequences of secondary brain injury processes with high spatial and temporal resolution while reducing the potential for iatrogenic injury inherent to current use of multiple invasive probes.

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The application of polyimide/silicon nitride dual passivation to AlxGa1−xN/GaN high electron mobility transistors

Cited by 8 publications

References 21 publications

Effects of Hydrogen Bonding in Silicon Nitride/Polyimide Passivation Bilayer in SiC Power Devices

Effects of Hydrogen Bonding in Silicon Nitride/Polyimide Passivation Bilayer in SiC Power Devices

Highly accurate thermal flow microsensor for continuous and quantitative measurement of cerebral blood flow

Development and application of a microfabricated multimodal neural catheter for neuroscience

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