1938
DOI: 10.1088/0959-5309/50/1/313
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The appraisement of lighting

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“…In short, the presence of the magnetic field opens operating regimes that are otherwise not possible. While the application of a magnetic field will induce non-uniformities in the discharge because of an induced E × B drift, through temporal manipulation of the magnetic field, the plasma uniformity across the wafer being processed can be controlled to some degree [3][4][5].…”
Section: Introductionmentioning
confidence: 99%
“…In short, the presence of the magnetic field opens operating regimes that are otherwise not possible. While the application of a magnetic field will induce non-uniformities in the discharge because of an induced E × B drift, through temporal manipulation of the magnetic field, the plasma uniformity across the wafer being processed can be controlled to some degree [3][4][5].…”
Section: Introductionmentioning
confidence: 99%