The electron beam is an important way to effectively simulate the thermodynamic effects of an intense pulsed X-ray and the materials for electron beam irradiation are of great significance to study the effects of energy deposition and thermal shock waves. Based on the input conditions like the actual current, voltage, and energy spectrum of an electron beam device (REB), the analytic method and the Monte Carlo method were used to calculate the energy deposition of a multi-energy-spectrum electron beam in materials of hard aluminum and carbon phenolic, the differences of the two methods were analyzed, the energy deposition profiles of different incident angles and energies were obtained, and the energy deposition of electron beam irradiation of a multilayer target was calculated as well. Through the numerical simulation and experimental study of thermal shock waves of electron beam irradiation materials, the calculation error was less than 10% by comparing the stress changes of thermal shock waves with different energies. This is helpful for studying the protective structure of spacecraft.