Transition metal complexes with β-diketonate and
diamine ligands are valuable precursors for the chemical vapor deposition (CVD)
of metal oxide nanomaterials, but the metal-ligand bond dissociation mechanism
on the growth surface is not clarified yet. We address this question by Density
Functional Theory (DFT) and <i>ab initio</i> molecular dynamics (AIMD) in
combination with the Bluemoon (BM) statistical sampling approach. AIMD
simulations of the Zn β-diketonate-diamine complex Zn(hfa)<sub>2</sub>TMEDA
(hfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; TMEDA = <i>N</i>,<i>N</i>,<i>N’</i>,<i>N’</i>-tetramethylethylenediamine)
show that rolling diffusion of this precursor at 500 K on a hydroxylated silica
slab leads to an octahedral-to-square pyramidal rearrangement of its molecular
geometry. The free energy profile of the octahedral-to-square pyramidal
conversion indicates that the process barrier (5.8 kcal/mol) is of the order of
magnitude of the thermal energy at the operating temperature. The formation of
hydrogen bonds with surface hydroxyls plays a key role in aiding the dissociation
of a Zn-O bond. In the square-pyramidal complex, the Zn center has a free
coordination position, which might promote the interaction with incoming
reagents on the deposition surface. These results provide a valuable atomistic
insight on the molecule-to-material conversion process which, in perspective,
might help to tailor by design the first nucleation stages of the target
ZnO-based nanostructures.<br>